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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Chapter 10
Service and troubleshooting
10.1. The vacuum in the chamber gets worse and worse over time. How to
improve the vacuum level?
The most common issue reported by our customers is the deterioration of vacuum levels. When the
plasma cleaner has used frequently, dust particles may contaminate the front surface of the door o-ring
and the door. Dust particles at the vacuum seal surface will cause the vacuum leak. This issue can be
resolved by simply wiping clean the front surface of the door o-ring and the front door regularly and
maintain a clean surface free of any visible particles. The o-ring groove has been lightly greased with
Apiezon 501 PFPE high vacuum grease. Please do not take the o-ring out of the o-ring groove because it
may cause dust particles to get into the bottom surface of the o-ring groove. If the PFPE vacuum grease
has been wiped clean, it may also increase the gas leak rate. Please purchase the Apiezon 501 PFPE high
vacuum grease and lightly grease the o-ring groove before inserting the o-ring into the groove if the o-
ring has been taken out of the groove.
10.2 Fail to start touchscreen user interface.
1.
Make sure the AC power switch is turned on.
2.
Make sure AC power cord is plugged into the utility plug.
3.
Check the fuse in the fuse box. Fuse box is located in the middle of the AC power entry module.
Use a small flat head screwdriver to gently open the fuse box as shown in Figure 16. If the fuse is
blown, replace it a right fuse specified in section 5.3
Figure 16, How to change the fuse
Fuse specification:
Size
: IEC 5X20mm;
Type
: Slow blown;
Current
: 2 amp for 220~230V AC; 4 amp for
100~110VAC,
Please read through safety precautions in chapter 5 before
performing any service on the machine.
