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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
10.15 Why the plasma intensity value doesn’t change when it reaches a
value of 800 or 1000?
In order to measure the low plasma emission intensity more accurately when the electronegative
oxygen gas is used or when the pulse duty ratio is very low to generate very weak plasma, the gain of
the plasma intensity sensor has been intentionally set to a high value. The dynamic range of the plasma
intensity sensor is from 0 to the maximum value of 800 or 1000. If pure argon is used to generate the
plasma, the plasma intensity sensor can easily reach the maximum value and saturate.
10.16 What to do if the plasma intensity sensor fails.
If the plasma sensor fails to detect the plasma emission, user can still use the plasma cleaner. Please set
the timer trigger mode in the system screen from “Count down timer when
plasma on
” to “Count down
timer when
rf on
”.
10.17 What to do if the pressure readings stays at atmospheric pressure?
1)
Make sure the vacuum pump is on.
2)
Make sure the vacuum pump is connected to the plasma cleaner.
3)
Disable the pressure sensor, manually pump down the chamber by turning on the vacuum pump
and open the pumping valve. Wait for 2 minutes. Then run a high power cleaning recipe. If the
system can successfully ignite the plasma, then it means the chamber has been pumped to low
pressure even though the pressure sensor reading stays at the atmospheric pressure. In this
case, the pressure sensor needs to be replaced. The plasma cleaner can be temporarily operated
without the pressure sensor.
4)
If the system can’t ignite the plasma in the previous step, Please make sure the pump valve is
working normally. If the user switches on and off the pump valve, a noise will come out of the
plasma cleaner.
5)
Make sure the door is sealed, and there is no big as leak sound.
6)
Make sure the quartz chamber is not broken.
10.18 How to use the plasma cleaner if the pressure sensor fails?
If the pressure sensor fails, the user can still operate the plasma cleaner by disabling the plasma sensor
in the system screen. Go to the system screen, click the button under the pressure sensor control label
to disable the pressure sensor. In this case, the system simply wait for 90 seconds for the system to
pump down the chamber after the user executes a recipe.
