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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
10.19 How to replace the pressure sensor if the filament burned out?
Depending on the model of the machine, it may have different pressure sensor installed in the system. It
could be MKS 925 Micropirani (Part number 925-12020 from MKS Instruments), Stinger CVM211PBL
from InstruTech Inc, or nAPG-LC RS485 NW16 (part number: D02691000) from Edwards Vacuum LLC.
Stinger CVM211PBL and Edwards nAPG-LC use platinum filament, which is more resistant to fluorine
type corrosive plasma. The pcb attached to Stinger CVM211PBL is a custom communication and
digitization board. Please keep the communication and digitization pcb when replacing the Stinger
CVM211PBL pressure sensor.
Depending on the usage rate, the pressure sensor may not last for more than two years. The pressure
sensor is considered as a component that may need to be serviced regularly by the users. And it is not
covered by the normal two years of warranty.
To replace the pressure sensor, first, take out the top two screws on the back panel of the plasma
cleaner. Then slide out the top panels. Find the pressure sensor on the back of the plasma chamber.
Make sure the system power is off.
For MKS 925 pressure sensor, lose the NW16 clamp for the pressure sensor. Take out the D-Sub15
connector from the old pressure sensor. Install the D-sub15 connector onto the new pressure sensor.
Then, install the new pressure sensor back with the NW16 clamp.
For Stinger CVM211PBL pressure sensor, find a 7/16 wrench to take out the three screws on the NW16
flange. Then loose the 4/40 screws on the communication and digitization PCB on the back of the
pressure sensor. Install the pcb onto the new pressure sensor. Install the pressure sensor back to the
NW16 flange. Don’t forget to add the mesh screen filter on the NW16 flange.
Figure 17, How to replace the pressure sensor.
Communication and
digitization PCB
7/16 wrench
