6
Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Chapter 4
List of figures
Figure 5, Front view of Tergeo plasma cleaner ........................................................................................... 19
Figure 6, sample chamber assembly ........................................................................................................... 19
Figure 7, Front cap for sample chamber. .................................................................................................... 20
Figure 8, backside of the Tergeo plasma cleaner ....................................................................................... 20
Figure 9, Touch screen user interface ......................................................................................................... 24
Figure 10, main screen of the user interface .............................................................................................. 26
Figure 11, rf power control ......................................................................................................................... 28
Figure 12, Recipe library ............................................................................................................................. 29
Figure 13, edit recipe window, left: the recipe can be edited by the user. Right: the recipe has been
locked to prevent unintended modification. .............................................................................................. 29
Figure 14, Job sequence .............................................................................................................................. 32
Figure 15, system setting screen ................................................................................................................ 37
Figure 16, How to change the fuse ............................................................................................................. 40
