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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Step 3, set up the plasma cleaner
Getting familiar with the system
Sample chamber
with cap and view
port
Front cap
locking groove
Pumping port
Opening for
pressure sensor
O-ring
Figure 5, Front view of Tergeo plasma cleaner
Figure 6, sample chamber assembly
The front surface of the o-ring should be free of dust particles.
Otherwise, it will create vacuum leak. Wipe the front surface of the o-
ring and the glass door regularly with lint-free wipes. If the o-ring has
been taken out of the o-ring grooves, then please reapply the vacuum
grease on the o-ring and inside the o-ring groove.
Quartz sample shelf.
The front edge of the
sample shelf should
align with the front
edge of the round
quartz chamber
When the system is shipped to the
customer site, the chamber might
be under partial vacuum. Do not
try to open the front door when
the system is still under the
vacuum. Once the chamber is fully
vented to the atmospheric
pressure, rotate the front door in
the counter clockwise (CCW)
direction and pull it out.
