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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Figure 9, Touch screen user interface
Please follow step 3 and 4 to test the gas leak rate, if potentially
dangerous gas such as hydrogen will be used.
Recommended gas input pressure is 5 ~ 10 PSI. Do not raise the
gas input pressure above 15 psig. For potentially dangerous gas,
such as hydrogen, please reduce the gas input pressure to 5 PSI.
It is recommended to turn off the power to the plasma cleaner
if user doesn’t plan to use the plasma cleaner within a couple of
hours.
Hydrogen gas must be pumped out of the confined space. Do
not let hydrogen gas exhaust enter the lab space. It must be
connected to dedicated exhaust line. Contact lab safety
manager on how to handle hydrogen exhaust gas.
