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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
3)
Start the plasma cleaning
. The user can now start the plasma cleaning session by executing a
predefined recipe or job.
4)
Unload the sample
. Once the plasma cleaning session finishes, click the vent button to vent the
sample chamber. Wait for at least 10 seconds after the venting sound stops. Then rotate the
front cap in CCW direction and pull it out. Once the door is open, take out the cleaned sample.
5)
Set the system in idle
. If the user doesn’t plan to use the plasma cleaner within an hour, please
close the valve on the compressed gas bottle and shut off the vacuum pump.
8.3 Understand the main screen layout
The main screen is divided into three sub-panels. The left panel shows the current recipe and job
sequence to be executed. The middle panel shows the system status, manual control buttons, and
inputs. The right panel shows navigation buttons and action buttons.
The user can manually pump down the chamber, vent the chamber, set gas flow rate, set up rf power
supply, switch between immersion and remote processing modes and set up timer using the buttons
and input text fields in the middle panel. The number displayed in the middle of the immersion plasma
source and the remote plasma source indicates the strength of the plasma in each source. The color of
the plasma source will vary with the plasma strength.
Figure 10, main screen of the user interface
Direct
source
Remote
source
Set and read gas flow rate for
each channel
Gas name label, to modify it, disable
the lock in the system screen
