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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
If plasma doesn’t ignite after the rf output is on, please click “Auto Tune” button.
8.4.6 Stop the process manually
By clicking the stop button on the right panel, the user can stop gas flow and rf power and place the
system in idle state.
8.4.7 Vent the chamber.
Once the user clicks the “Vent” button, the system will close the pump valve and open the vent valve
and let the gas connected to the vent gas inlet port enter the sample chamber. A sizzling gas leaking
sound can be heard. Pressure reading will rise. Wait for at least 10 seconds after the venting sound stops.
Then rotate the front cap in CCW direction and pull it out.
The automatic venting sequence will not vent the hose section between the vacuum pump and the
plasma chamber. If the user wants to vent the vacuum hose, please shut down the vacuum pump and
manually open the pump valve and the vent valve on the plasma cleaner.
8.5 Set up recipes in recipe library.
Click the “Recipes” button in the main screen (Figure 9). Recipe library screen (Figure 12) will appear on
the user interface. Recipe library can store 20 recipes. Blue highlighted row indicates the current
selection. Once a recipe is selected, the user can click the “Edit Recipe” button to change the recipe or
click the “Load Recipe” button to load the recipe onto the main screen.
Figure 11, rf power control
Set rf power here
Duty ratio for
pulsed mode.
