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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
9.
Pump down the chamber again after purging.
8.6.4 Execute a job sequence
Job sequence function can execute up to three recipes with the click of a button. Recipes to be executed
in the job sequence is specified in the three boxes (Figure 14) at the bottom left corner of the main
screen. Number 0 means the step is not enabled. Here are the steps to execute a job sequence:
1)
Specify the recipe number in job sequence tabs.
2)
Make sure the vacuum pump is on.
3)
Click Run Job button to start the job.
The execution steps of each recipe is the same as the steps mentioned in the previous section.
8.7 Tune the impedance
If the plasma fails to ignite, the user can click the auto tune button to start the auto-impedance
matching routine. Autotune feature will automatically start during recipe or job execution.
8.8 What to do after plasma cleaning finishes.
1.
Vent the sample chamber and take out the samples
2.
Click the “finish up” button. Then plasma cleaner will automatically pumping down the sample
chamber again. Once the pressure stabilizes, the plasma cleaner will then turn off the vacuum
pump.
Figure 14, Job sequence
