PTI SENTRY 1510, Operation & Installation Manual

Page 1: ...process tube from house ex haust pressure variations The 1510 provides a stable repeatable process pres sure allowing process optimization and improving process repeatability 1 The SENTRY 1510 provid...

Page 2: ...down 2 The spring moving the piston up or down 3 Clean room pressure forcing down on the inside of the piston 4 Process pressure on the bottom of the piston The piston s vertical position forms a gap...

Page 3: ...se the pull on the piston closing off the valve As the valve is closed off the pressure differential across the valve is increased and the upstream side is maintained at a constant Nitrogen Supply Nit...

Page 4: ...ouse exhaust is required and in some specific installatios additional house exhaust is required This section allows the user to calculate the amount of exhaust required for a specific installation Cal...

Page 5: ...he Sentry 1510 this measurement is taken at the furnace exit at the transition block noted by PSense on Figure 1 3 which connects the quartz exit tube with the Teflon exhaust piping reflecting the tru...

Page 6: ...ain house exhaust duct This pressure drop must also be accounted for if house exhaust is determined at the main duct Example Using the above calculation with a negative process pressure taking into ac...

Page 7: ...arameters For more information on the Supervisor refer to the SENTRY Supervisor Operation Manual and Serial Communications Programmer s Guide There are two options for supplying power to the Superviso...

Page 8: ...When the recipe entry for exhaust level changes the process tool controller changes the set point signal The Supervisor receives the set point signal at an A D port The Supervisor interprets the digi...

Page 9: ...n how the piston controls see section 1 page 2 Differential Pressure Transducer The differential pressure transducer is mounted on the SENTRY 1510 body and measures the pressure differential between t...

Page 10: ...er sends a voltage 0 5 V representing the set point 0 50 80 mm H2O to the SENTRY Supervisor The SENTRY Supervisor converts the analog signal to a digital set point and uses this as described under Man...

Page 11: ...ation Manual General Installation Requirements The direction of flow on the SENTRY 1510 is indicated by an arrow in the white Teflon portion of the controller The arrow head must be installed pointing...

Page 12: ...LCD display and to allow access to the keypad It must be mounted at least 24 0 6 meters from the floor The Supervisor can be mounted on a panel by using the wall mounting brackets provided which can...

Page 13: ...ve a reduced I D depending on the furnace manufacturer The quartz I D should be no more than 10MM If a smaller line is used the pressure differential across it may prevent the SENTRY from controlling...

Page 14: ...stalling and applying house nitrogen to the SENTRY 1510 nitrogen input port The SENTRY 1510 provides two gas line fittings one on either side of the controller body The Swagelok fitting on the inlet s...

Page 15: ...ve feet then the transducer will need to be recalibrated See section 5 page 2 for the calibration procedure It is recommended that the sense location for sensing the process pressure be as close to th...

Page 16: ...r used in the SENTRY 1510 is a 4 phase design One wire is required for each phase and two 12 volt DC lines are required The second interface is the 3 wire shielded process differential pressure transd...

Page 17: ...mbers for cables of different voltages 0 5 Volt Analog Interface Powered from the Process Tool Controller In this configuration the SENTRY system derives its power from the standard DC power distribut...

Page 18: ...e Installed SENTRY 1510 Prior to performing process tests with the new SENTRY 1510 exhaust system in stalled it is recommended that an initial series of tests be performed to ensure that the system ha...

Page 19: ...to change the GainFine to 10 Press the Enter key ENT to execute the change 2 Change the Deadband to 56 Use the down arrow key to scroll to Deadband Press the Star key to enable the change Use the up a...

Page 20: ...iometer clockwise to darken the display characters Too much contrast will saturate the entire display matrix to black Turn the potentiometer counterclockwise to lighten the display characters 1 Use th...

Page 21: ...t will become activated by pressing the return key ENT The designator will disappear to indicate that the new set point has been accepted Line two of the LCD display shows the active set point and the...

Page 22: ...Quad mode will cycle between all 4 set points Dual mode will cycle between Pres Sp1 and Pres Sp2 3 To enable the cycle mode scroll to the Cycle menu item Change the cycle flag from Disable to Enable T...

Page 23: ...l should be 0 5 volts The Supervisor is able to display what the input set point voltage is by changing the menu item to Aux In Auxiliary Input Auxiliary input is displayed in engineering units of vol...

Page 24: ...ce allows the process tool controller to access parameters in the Supervisor menu Due to the Supervisor s ability to save configuration by using the Save Data command many parameters can be initialize...

Page 25: ...the Swagelok fitting on the SENTRY 1500 3 Disconnect the sense line from the barbed fitting 4 Disconnect the cable from the Supervisor to the SENTRY 1500 5 Disconnect the inlet and outlet fittings 6...

Page 26: ...Menu Structure Overview The Supervisor command menu contains 65 entries of which one entry is a blank line denoting the end of the menu The menu is a circular list which can be scrolled either up or d...

Page 27: ...ue of an entry that has been selected with the star key 3 The Enter Key ENT The enter key ENT is used to enter into memory a menu value that has been changed by the up or down arrow keys or Example To...

Page 28: ...oint Mode or StptMode menu entry This entry is used to define the source of the set point as being either a digital set point via RS422 RS485 interface or locally via the keypad Single or an analog se...

Page 29: ...s of most installations If changes are made to the default settings that cause the SENTRY 1510 to respond poorly these values can be re entered The factory values can be found in Section 7 Operating t...

Page 30: ...of once per month The following should be included in the PM INOTE PM Procedures will disrupt control of the furnace Do NOT perform PM procedure when running production 1 Remove the four button head s...

Page 31: ...brate the Pressure Transducer If the installation of the SENTRY 1510 relative to the furnace prohibits the use of the standard length 5 15 feet of process sense tubing then it will be necessary to rec...

Page 32: ...ENTRY 1510 by removing the four button head screws Lift the cover straight up off the controller body 1 Attach the new length of sense tubing to the barbed fitting Stretch out the sense tubing so it i...

Page 33: ...re of 950 C or greater 1 Seal furnace and introduce a flow of 10 slm N2 2 Set the supervisor Gain to 10 and give and observe the pressure graph 3 Change the N2 flow to 5 slm 4 Observe the supervisor d...

Page 34: ...controller to Supervisor cable 5 Pressure sense line from SENTRY barbed fitting to process tube 6 Nitrogen to Swagelok fitting on SENTRY 7 Supervisor power on 1 2 3 4 6 7 X To drain 5 SENTRY 1510 Fig...

Page 35: ...ocess chamber fully sealed Check all fittings on process side of the Sentry 1510 for leaks Yes Yes Yes Yes Turn on N2 and adjust regulator for 40 90 PSI Connect process sense line Seal chamber Elimina...

Page 36: ...n Turn on supervisor power Is the desired set point indicated next to Pres SP No Yes No Set Supervisor Parameter StepLim to Off Is the supervisor Parameter Step Limit Off No Yes Replace Sentry 1510 Ar...

Page 37: ...n on supervisor power Is the desired set point indicated next to Pres SP No Yes No Set Supervisor Parameter StepLim to Off Is the supervisor Parameter Step Limit Off No Yes Replace Sentry 1510 Are all...

Page 38: ...fy connections to your process tool See Figure 6 1 for basic wiring Yes Verify that proper voltages are present on P2 of the supervisor Yes Replace Supervisor Yes Is the supervisor power on Turn on su...

Page 39: ...ge 1 7 1 Standard Cable Assemblies A 2 0 5 Volt Analog Interface Powered from the Process Tool Controller The following Cables are standard for this interface SENTRY to Supervisor Interface Cable W101...

Page 40: ...6 mm Weight 7 lbs 3 2 Kg SENTRY SUPERVISOR Length 7 9 201 mm Width 1 75 45 mm Height 6 0 152 mm Weight 2 lbs 0 9 Kg Wetted Path Materials Ryton Teflon and Viton Elastomers Power Options Supply DC 15 t...

Page 41: ...Grade House Grade or Better House Exhaust Minimum Negative Pressure Config 1 0 4 H2O more negative than set point 10 mm H2O more negative than set point Minimum Positive Pressure Config 0 5 H2O 13 mm...

Page 42: ...Transducer 50 80 mm WC Flow FS X House FS X Aux FS 5000 Analog Input Full Scale definition for set point control Full Scale is 5 000V SaveData To save menu configuration in non volatile EEPROM 1 pres...