Q150T Sample Preparation System
10473 - Issue 5
66
Q150T - Instruction Manual
7.8
102mm Stage and Gearbox
The 102mm stage (10458) is designed to hold 102mm (4”) silicon wafers (see Figure
7-13). If you want to use a FTM with this stage, install the stage gearbox assembly
(10359).
The sample stage gearbox allows you to install the sample stage in an offset rotating
position. To install the 102mm stage and its gearbox:
1.
Check the machine is not operating.
2.
Open the top cover fully so it rests against its backstop.
3.
Remove any installed stage by lifting carefully upwards.
4.
Remove the M3 socket cap screw securing the turbo mesh (this is the screw
nearest to the stage rotation drive spigot).
5.
Fit the gearbox:
a.
Locate its shaft into the top of the stage rotation drive spigot
b.
With a twisting motion, push it gently down until it sits down on the turbo
mesh.
c.
Secure in place with the M3 x 16 socket cap screw provided.
6.
Fit the large stage by locating its shaft in to the top of the stage rotation drive
spigot protruding from the base plate and with a twisting motion pushing it gently
down until the collar around the shaft rests on top of the drive spigot.
7.
Adjust the stage height above the base plate:
a.
Slacken the M3 screw in the collar with a hexagonal key
b.
Slide the collar to the desired position and retighten the M3 screw.
Remove the collar if you need more distance between the stage and the target:
the underside of the stage then rests on the top of the drive spigot.
Figure 7-13.
Large (102mm) Sample Stage and gearbox
Summary of Contents for Q150T S
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