Q150T Sample Preparation System
10473 - Issue 5
10
Q150T - Instruction Manual
2
Installation
It is important that this equipment is installed by skilled personnel in accordance with
these instructions. Failure to do so may result in damage or injury. 'If in doubt - ASK'.
2.1
Pre-installation
Identify a suitable location for the unit:
Mount the unit on a bench or the recommended trolley. The total weight of the system
is 33.4 kg.
The environment should have an ambient temperature range of 15ºC to 25ºC in a
non-condensing relative humidity of not more than 75%.
Sufficient ventilation is required, and positioning should be out of direct sunlight.
The system is rated for continuous operation.
2.1.1
Required Services
Argon
Supply for sputtering should be N4.8 (Zero Grade) 99.998% purity capable of supplying
3 litres/min at 4 psi. The regulator should be set at 4 psi.
The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from a quick
release connector on the rear of the unit. It is the customer’s responsibility to connect
this tube to the pressure regulator from the gas bottle or plant supply. Typically a system
will use approx. 0.2 litres of Argon for a 4 minute sputter cycle (plus up to 4 litres if argon
is also used for purging and venting).
If bottle supply is adjacent it can be isolated locally, if not or plant supply,
local isolation valves should be fitted.
Nitrogen
Supply for purging should be N4.8 (Zero Grade) 99.998% purity capable of supplying 3
litres/min at 4 psi. The regulator should be set at 4 psi.
The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from a quick
release connector on the rear of the unit. It is the customer’s responsibility to connect
this tube to the pressure regulator from the gas bottle or plant supply. Typically a system
will use up to 4 litres when Nitrogen is used for purging and venting.
If bottle supply is adjacent it can be isolated locally if not or plant supply,
local isolation valves should be fitted.
Pressure Regulators are Customer Supply, Nitrogen is recommended for
Purging for Economy, Argon must be provided for Sputtering, it can also be
used for Purging in the event of Nitrogen purge gas not readily available.
Typical regulators suitable for Argon and Nitrogen are the C106X/2 series available
from BOC
http://www.boconline.co.uk/en/products-and-supply/speciality-
equipment/regulators/two-stage-regulators/c106x2-series/c106x-2-series.html
Electrical supply
90-240V, 50/60Hz, 1350VA, including pump.
Vacuum Pump
Pump No 3 complete with Vac. Hose & Oil Mist Filter 35 litre/min 2m³/hr.
Summary of Contents for Q150T S
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