Q150T Sample Preparation System
10473 - Issue 5
18
Q150T - Instruction Manual
3.2
Running a Profile
Before you can run a profile, ensure you have:
Completed the installation as described on page 10.
Switched on the instrument (see section 17).
Loaded a sputter/coating target or loaded an evaporation source (see page 54).
To run a profile:
1.
Load your sample onto the center of the sample stage.
2.
Close the top cover assembly and press it firmly down to secure the latch.
3.
Tap on the down arrow button to open the dropdown list of profiles (see
Figure
3-2
).
Figure 3-2.
Selecting a profile
4.
The Q150T has several default profiles for common tasks as shown in Table 1.
Tap on the name of the profile you want to run.
Table 1
Q150T Default Profiles
PROFILE NAME
PURPOSE
QT Time Chromium
Sputter coating run using Chromium target (see page 28)
QT Chromium 5nm*
Sputter coating run using Chromium target terminated by FTM at a
coating thickness of 5nm (see page 28)
QT Metal evaporation
Coating using metal evaporator (see page 31)
QT Aperture cleaning
Default profile for aperture cleaning (see page 40)
QT Pulse rod evap
Evaporation using carbon rods (see page 32)
QT Pulse cord evap
Evaporation using carbon cord (see page 32)
QT Controlled pulse
Evaporation using FTM termination of carbon cord (see page 32)
QT Vent chamber
Vent sample chamber
QT Vacuum shutdown
Pumps chamber to 1mBar to allow shutdown under vacuum
* Profile only present on systems equipped with FTM.
5.
Tap on the
Run Profile
button. The Q150T starts pumping the sample chamber.
The progress of the run is shown through a series of on-screen messages (Figure
3-3).
Summary of Contents for Q150T S
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