Q150T Sample Preparation System
Q150T - Instruction Manual
39
10473 - Issue 5
5.8
Using Outgas Source options
In addition to the evaporation parameters described in the previous section, you can also
set up enhanced outgassing with the
Outgas Source
user parameter. This has three
settings:
multiple
,
single
or
none
as described in Table 10.
You need to be logged in at Administrator level to access this parameter
(see page 49).
Table 10
Outgas Source options
Setting
Action
Single
outgas
Applies the outgas current for the outgas time once. If the
vacuum max recovery time
is zero the coat cycle will automatically start. Otherwise, the current is turned off and
outgas recovery starts. In this period, the Q150T waits for the vacuum to return to
the level it was before the current was applied. This time is limited by the
max outgas
recovery time
parameter (default 10s). After this, the coating continues
automatically.
Multiple
outgas
The Multiple outgas option allows you to verify that out gassing is occurring and to
decide to continue or repeat the outgas cycle. It applies the outgas current and
outgas recovery as above. After a cycle is completed, you are prompted to (a) carry
out further out gas cycles, (b) start the coating or (c) vent the chamber.
If the vacuum is less than 0.05 mbar below the vacuum after the outgassing, the
Coat
button changes to green to advise that further outgassing is not necessary.
None
Skips the outgas step and waits 5 seconds for the stage to speed up before
commencing coating.
5.8.1
Setting Outgas Source options
To set up outgassing options:
7.
Change the user group mode to
Admin
level (see page 49).
8.
Select
Edit | Profiles
(see page 21).
9.
Choose the profile you want to edit.
10.
Tap on
Outgas source
.
11.
Select
Multiple
,
Single
or
None
.
12.
Tap on
OK
to confirm the change.
5.8.2
Running Multiple Outgassing
When you run a profile modified for multiple outgassing, you are prompted to repeat
outgassing or proceed with coating (see below).
Tap on the
Repeat
button to run another outgas cycle.
Tap on the
Coat
button to continue with the coating following the parameters set for
the particular profile.
Figure 5-6.
Prompts to repeat the outgas procedure (left) and proceed with
coating (right)
Summary of Contents for Q150T S
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