1
Outline
The KS-93 is an in-line process counter sensor which detects the size and
number of particles floating in gas, using the light-scattering method.
Measurement results are output via an interface.
At the time of shipping, the leak rating of gas-contacting parts is 1 × 10
-4
Pa·L/s or lower (measured according to the vacuum vessel method). This low-
leak construction allows measurement also of particles in toxic or highly
reactive gases.
The KS-93 consists of the sensor unit and the power supply unit.
The KS-93 is not explosion-proof, but the particle detector is hermetically
sealed and the interior can be purged with inert gas for safety in the event of a
leak due to cell damage.
Particles are measured in five size ranges (
≥
0.1
µ
m,
≥
0.15
µ
m,
≥
0.2
µ
m,
≥
0.3
µ
m,
≥
0.5
µ
m), and the rated sample flow is 100 mL per minute. As the
KS-93 does not incorporate a flow control, the flow rate of the sample gas
must be controlled by external means.
A serial interface and a multi-point monitoring system interface are built in as
standard. Except for power on/off, all functions are controlled from external
equipment. The sensor controller KZ-70 (option) can be connected via the
multi-point monitoring system interface, for operation control and display of
measurement results.
Summary of Contents for KS-93
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