25
To Enter the Item Field, Click on the desired row in the column titled “Item”. The
following dialog box will appear.
Figure 4.1.3.2 User Selectable Maintenance Description
Enter the description of the new maintenance item.
To Enter the new item’s maintenance frequency, to the right of the recently added
maintenance description field, Click on
#days box.
The dialog box in Figure
4.1.3.3 will appear.
Figure 4.1.3.3 Maintenance Frequency Dialog Box
Enter the desired maintenance frequency in days.
4.1.3.3.Check the exhaust stacks, after 6 months of operation, for possible
buildup of materials generated from firing processes.
The stacks should be cleaned, as necessary, with a brush and solvent to
remove the buildup. A periodic inspection of the stacks is essential to
establish a sensible maintenance cycle, since some processes will require
frequent cleaning, and others require none at all.
4.1.3.4.Check (Optional) Mass Flow Controller “Zero” Output, after 6
months of operation.
Furnace Mode “OFF” mode and with all Mass Flow Controllers Set for
zero flow (Gas Flow Window). After a thirty minute warm-up interval,
check for each flowmeter output signal (refer to mass flowmeter
schematic) for a 0.0 ± 0.05vdc signal. If necessary, rotate the
appropriate mass flow controller’s “Zero Adjust” pot until the required
output is achieved. The zero adjust pot is located on the side of the mass
flow controller near the top.
Summary of Contents for 2115150301
Page 23: ...22 Figure 3 8 1 1 Event Logging ...
Page 44: ...43 Section 6 PRODUCT SPECIFICATION 6 PRODUCT SPECIFICATION ...
Page 62: ...61 View Product Tracking ...
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