76
F9.15
MS frequency 9
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.16
MS frequency 10
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.17
MS frequency 11
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.18
MS frequency 12
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.19
MS frequency 13
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.20
MS frequency 14
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.21
MS frequency 15
-upper limit Freq.
~
upper limit
Freq.
0.01Hz
0.00
○
F9.22
Acc/Dec time of stage
0
0
~
3
1
0
○
F9.23
Run time of segment 0
0.0
~
65535.5 S (M)
0.1S(M
)
0.0
○
F9.24
Acc/Dec time of stage
1
0
~
3
1
0
○
F9.25
Run time of stage 1
0.0
~
65535.5 S (M)
0.1S(M
)
0.0
○
F9.26
Acc/Dec time of stage
2
0
~
3
1
0
○
F9.27
Run time of stage 2
0.0
~
65535.5 S (M)
0.1S(M
)
0.0
○
F9.28
Acc/Dec time of stage
3
0
~
3
1
0
○
F9.29
Run time of stage 3
0.0
~
65535.5 S (M)
0.1S(M
)
0.0
○