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About this Instruction Manual
This instruction manual explains how to handle SEPAREL® EF small size
degassing modules, such as the EF-MICRO, EF-G2, EF-G3, and EF-G5 series,
with precautions to be followed for your safety.
Before using the SEPAREL® EF small size series, be sure to read this
instruction manual to ensure safe and proper use.
Depending on use conditions, proper methods for usage and storage may differ
even though there are descriptions about usage methods, storage methods, and
risks associated with the product module within this manual.
Please note that this manual does not describe all information about risks
related to usage and storage of the product.
Although the content of this instruction manual is based on reliable testing and
measurement results, no guarantees are provided for its accuracy.
DIC does not have any responsibility for anything described or not described in
this manual.
The details of this instruction manual may be modified for improved reliability of
the SEPAREL® EF series or to account for changes in its design.
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Application Materials Product Division
INSTRUCTION MANUAL
