5
Contents
1. General Precautions P. 5
2.
Upon Receipt
P. 5
3.
Installation
P. 5
4.
Start-Up
P. 9
5.
Shutoff and Storage
P. 10
6.
Restart
P. 11
7. Maintenance
P. 11
Reference Data
1. Basic Principles of Degassing
P.11
2. Vacuum Pressure Degree
P.12
3. Setting Value of Vacuum Pressure Degree
P.13
4. Range of Liquid Flow Rate
P.14
5. Inner Volume
P.15
6. Trouble shooting
P.16
Contacts
P.17
5
Application Materials Product Division
INSTRUCTION MANUAL