8
8
<
Example of Installation
>
The above example is for your reference.
Depending on use conditions, the above example may not be suitable.
※
Optimal flow direction differs by use conditions and the above flow
direction is not always the correct direction. For suitable flow direction,
contact us.
Liquid Feeding
Pump
Liquid Tank
Filter
Vacuum
Pump
Leak Valve
Trap
Vacuum
Meter
Degassing
Module
Filter
3. INSTALLATION
Application Materials Product Division
INSTRUCTION MANUAL