9
5. Vacuum Setting and Operation
①
Connect the input gas to the Gas in port.
②
Connect the Vacuum Pump to the Vacuum port.
③
Turn the Vacuum & Vent valve towards Vacuum.
④
Close the Gas valve.
⑤
Operate Vacuum Pump. (Vacuum gauge begins to fall.)
⑥
When the vacuum gauge is completely fallen as shown in the below figure, place the
Vacuum & Vent valve in the center.
⑦
Turn off Vacuum Pump.
⑧
Open the Gas In valve. (Vacuum gauge begins to rise.)
⑨
When the vacuum gauge reaches atmospheric pressure, open the Gas Out valve.
Vacuum
Atmospheric pressure
Pressurization
[Gauge status]
Summary of Contents for SH-FU-1.5MGV
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