Chapter
4
Operation
The evaporator is capable of evaporating a huge range of materials from thicker
2mm rods of refractory materials requiring high e-beam powers to small crucibles
full of high vapour pressure material requiring very little power. For this reason
care must be taken not to exceed the power required for a particular material.
For all materials there will be a maximum physical achievable evaporation rate, which
will be reached when the local vapour pressure around the tip of the rod or mouth of
the crucible is high enough for the HV to generate an arc through the vapour. This will
be noticeable as a pulse in the emission current.
4.1 Operating the EBE-1 Shutter
The shutter should be rotated gently by hand. Only 75
o
of motion is required to open
and close it. The shutter is CLOSED at 0
o.
The shutter is OPEN at 40
o
4.2 Evaporation from Rod
ENSURE THAT ALL THE CABLE CONNECTIONS HAVE BEEN MADE
Ensure the chamber pressure is ~10
-5
Torr(mbar) or less.
9
Summary of Contents for EBE-1
Page 1: ...EBE 1 Electron Beam Evaporator 1 11...
Page 8: ...Inspection 4 EBE 1...
Page 22: ...Operation 18 EBE 1...
Page 28: ...Drawings 24 EBE 1 Figure 4 Evaporator details...
Page 30: ...List of Figures II EBE 1...
Page 32: ...List of Tables IV EBE 1...
