Health and Safety Declaration for used Vacuum
Equipment and Components
The repair and/or service of vacuum equipment/components can only be carried out if a correctly
completed declaration has been submitted for every component.
1.______________________________________________Description
of
components
Type: __________________________________________Serial No:_____________________
2.
Reasons for return
____________________________________________________________
3. Equipment condition
Has the equipment ever come into contact with the following (e.g. gases, liquids, evaporation
products, sputtering products ...)
Yes
No
•
toxic substances?
•
corrosive substances?
•
microbiological substances (incl. sample material)?
•
radioactive substances (incl. sample material)?
•
ionising particles/radiation (
α
,
β
,
γ
, neutrons, ...)?
Yes
No
Is the equipment free from potentially harmful and hazardous
substances?
4. Decontamination Procedure
Please list
all harmful substances, gases and by-products
which have come into contact with the vacu-
um equipment/component during the decontamination methode used.
SUBSTANCE
DECONTAMINATION METHODE
5.
Legally Binding Declaration
Organisation:
Address:
Phone/Fax:
Name/Position:
I hereby declare that the information supplied on this form is complete and accurate.
Date:__________Signature:_____________Company stamp
Rev.: 0
1/1
Summary of Contents for EBE-1
Page 1: ...EBE 1 Electron Beam Evaporator 1 11...
Page 8: ...Inspection 4 EBE 1...
Page 22: ...Operation 18 EBE 1...
Page 28: ...Drawings 24 EBE 1 Figure 4 Evaporator details...
Page 30: ...List of Figures II EBE 1...
Page 32: ...List of Tables IV EBE 1...
