Analyzer Checks
a broad illuminating X-ray source, additional “MCD Calibration” for the point source
may be required.
8.2 Energy Scale Tests with XPS
8.2.1 Check Kinetic Energy Scale
Transfer a gold/copper sample into the system. Clean carefully by ion sputtering. With
this sample the main peaks are separated far enough for calibration purposes. The Au
4f
7/2
and Cu 2p
3/2
peaks energy difference is 848.66
±
0.03 eV
Adjustments:
Excitation
Mg K
α
X-ray power
100 W
Slit
entrance: largest slit / exit: open
Mode
Medium Area
Binding energy range 82 - 86 eV for the Au 4f
7/2
peak
930 - 937 eV for the Cu 2p
3/2
peak
Dwell Time
100 msec
Scan
1
Energy step
25 - 30 meV
Pass energy
~8 eV
8.2.2 Check Peak Position
Check for proper peak positions corresponding to table 14 on page 67. If the peaks off-
set consistently, check if the proper peak position can be achieved by correcting the
Work Function, sections 7.4 - “Work Function Calibration with UPS” on page 61, 7.5 -
“Work Function Calibration with XPS” on page 62 or 7.7 - “Gain Calibration with XPS”
on page 64. If this is not the reason, a complete calibration (as described at the begin-
ning of this chapter) is required or there is a failure in the analyzer or supply (chapter 6,
"Troubleshooting" on page 51).
Note: Strong displacement usually caused by poor contact inside the analyzer (see
“Connection check for the analyzer electrodes” on page 70) or control unit failure (see
“Control Unit Check” on page 61) .
Peak
Mg K
α
Binding Energy, eV
Al K
α
Binding Energy, eV
Au 4f
7/2
84.00 ± 0.01
83.98 ± 0.02
Ag 3d
5/2
368.27 ± 0.01
368.26 ± 0.02
Cu 2p
3/2
932.66 ± 0.02
932.67 ± 0.02
2 XPS: Binding Energy Calibration of Electron Spectrometers 5 - Re-evaluation of the Reference Energies.
M.P.Seah, I.S.Gilman and G. Beamson, Surfaceand Interface Analysis 26, 642-649 (1998)
66
Summary of Contents for PHOIBOS 100
Page 1: ...PHOIBOS Hemispherical Energy Analyzer Series PHOIBOS 100 PHOIBOS 150 3 1...
Page 6: ...Table of Contents PHOIBOS...
Page 10: ...Introduction 4 PHOIBOS...
Page 13: ...Electrical Connections Figure 2 Connection Scheme PHOIBOS 7...
Page 14: ...Components and Connections Figure 3 Analyzer Housing PHOIBOS100 8 PHOIBOS...
Page 15: ...Electrical Connections Figure 4 Analyzer Housing PHOIBOS150 PHOIBOS 9...
Page 42: ......
Page 51: ...SpecsLab Hardware and Software Installation PHOIBOS 45...
Page 52: ......
Page 62: ......
Page 78: ...Analyzer Checks Figure 33 Schematics of the 12 pin Analyzer Feedthrough 72 PHOIBOS...
Page 80: ......
Page 86: ......
Page 92: ...List of Figures Figure 39 Alignment Pin 84 II PHOIBOS...
Page 93: ...List of Figures PHOIBOS III...
Page 94: ......
Page 96: ......
Page 98: ...Index PHOIBOS...
