For most purposes, you can assume that n = 1, since the number of multiply charged ions only amounts to a few percent
of the total number. From the equation, you can therefore see that the kinetic energy of the ions is the value of the
Energy parameter in eV.
The energy range spans from 0 eV to 5000 eV for singly charged ions. The majority of ionizer sputter guns work reas-
onably well with energies starting from 100 eV. After high voltage is applied to the source by pressing Operate, the high
voltage ramps to the desired value. After switching off, it drops down slowly to 0 V.
The energy range spans from 0 eV to 5000 eV. After high voltage is applied to the source by pressing Operate, the high
voltage ramps to the desired value. After switching off, it drops down slowly to 0 V.
The energy ion current monitored and measured within the IQE 12/38 is approximately 40–60
μ
A for optimized gas pres-
sure and 5000 eV ion energy. When the sample current is at a maximum, this indicates the gas pressure is optimized.
Danger—High Voltages Present!
Do not disconnect cables without turning off the mains supply switch of the PU IQE 12/38. Wait at least
1 minute after switching off before disconnecting anything, in order to avoid the risk of serious injury or
death!
To set the energy:
1. Press the Energy button. The Energy menu is displayed.
Figure 7: Setting the energy
2. Press the Modify button. The LED above the Modify button will light and flashing triangles will appear below the
parameter value.
3. Enter a new value using one of the following methods:
■
Turn the jog shuttle until you reach the desired value.
■
Press and hold Num while entering the desired number using the numerical keys. The numbers are entered
from right to left.
4. Press Modify to accept the value. If you want to change the value, press Modify again to enter the edit mode.
3.4.3 Extractor
This voltage is responsible for extracting the ions out of the ionization region.
Normally, when you select this parameter, the display shows the applied voltage and the extractor current. When using
the Modify mode to change the value, the voltage is replaced by a percentage.
14
April 26, 2013
PU IQE 12/383.0
Chapter 3 Front Panel Control
