Chapter 3 Front Panel Control
To view the Emission menu, press the Emission button. The menu displays the following information:
■
Filament voltage.
■
Filament current.
The filament current is limited by the I
Limit
setting—see "I Limit" on page 20.
You cannot change the filament voltage and current directly—you need to change the emission current:
1. Press the Emission button to enter the Emission menu.
2. Press Modify. The display changes to show the emission current. The LED above the Modify button will light and
flashing triangles appear to show that you can modify this value.
Figure 10: Setting emission current
3. Enter a value between 0.1–10 mA using one of the following methods:
■
Turn the jog shuttle until you reach the desired value.
■
Press and hold Num while entering the desired number using the numerical keys. The numbers are entered
from right to left.
4. Press Modify to accept the value. If you want to change the value, press Modify again to enter the edit mode.
3.4.6 Pos X and Pos Y
These parameters define the position of the middle of the area scanned by the ion beam.
The range spans from
−
5 mm to +5 mm. For Pos X and Pos Y, values are only valid for which the selected area does not
exceed the 10 × 10 mm maximum square area centered at the zero position of the ion beam.
If this area is exceeded, a flashing sign appears to the right of the position value. Selecting a smaller area or moving the
square in the direction of the center of the 10 × 10 mm maximum area will deactivate the warnings.
Both parameters are set with the same procedure. To set Pos X and Pos Y:
1. Press and hold Num, then press Operate to set the unit into Off mode.
2. Press the Setup button repeatedly until the display shows X Position or Y Position, depending which you want to
set.
PU IQE 12/383.0
April 26, 2013
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