Chapter 5 Troubleshooting
Possible cause
Solution
(slow blow) in the emission regulation module if still no voltage is displayed.
Filament broken
Perform the checks in "Filament and Repeller Voltages" on page 40, "Checking
the Resistance" on page 37 and "Measuring Power Unit Voltages" on page 37.
If the filament is broken, you will need to service the ion source.
Sputter gas pressure too high
Check valves and pressure measurement.
Table 11: Troubleshooting no degas operation
Dark display
Possible cause
Solution
No mains voltage
Check cabling of mains input.
Fuses blown
Check fuses and size, see "Specifications" on page 45.
Table 12: Troubleshooting dark display
5.2 Checking the Resista nce
A basic test to ensure that the ion source is able to operate correctly is to check the resistance. If there are any short cir-
cuits, the PU IQE 12/38 will not be able to work.
You should check the following:
■
Resistance between each of the pins. Pins 1 and 3 are the filament; there should be a resistance of ~0.3
Ω
. Pins 2
and 4 should show infinite resistance to other pins.
■
Resistance between the pins and the chamber. This should be infinite in all cases.
Note: The resistance may depend on temperature or applied voltage.
5.3 M ea suring Power Unit Volta ges
You can perform a number of checks on the output voltage in order to check the correct operation of the PU IQE 12/38.
Please refer to "Output Voltages" on page 46 for a schematic view of the voltages in the source.
This section describes the preparatory steps for the measurements. The following sections provide instructions for check-
ing the voltages for energy, anode, repeller and degas.
Danger—High Voltages Present!
The tests performed in this section involve lethal voltages. Only qualified personnel should perform
these tests. Always use appropriate equipment and precautions.
You need the following tools in order to perform these tests:
■
Digital voltmeter (DVM), 3½ digit.
■
High voltage probe (HVP) (voltage divider 1:1000, at least 100 M
Ω
).
To prepare the PU IQE 12/38 for the tests:
1. Switch off the PU IQE 12/38.
2. Wait for one minute before proceeding in order to allow any voltages to discharge.
3. Disconnect all cables from the back of the PU IQE 12/38.
PU IQE 12/383.0
April 26, 2013
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