Chapter 2 Basic Operation
PU IQE 12/383.0
April 26, 2013
3
Chapter 2
Basic Operation
This chapter explains how to set up the PU IQE 12/38 and use it to control the ion source.
More detailed information about the operation of the power supply and its features is provided in later chapters—in par-
ticular, you will find a thorough treatment of all operating modes in "Front Panel Control" on page 7. You should famil-
iarize youself with the contents of this manual in order to take full advantage of all the features offered by the PU IQE
12/38, so that you can tune individual parameters to obtain best performance.
2.1 Insta lla tion
The PU IQE 12/38 fits into a standard 19" rack. The steps below describe the procedure and the issues that you need to
observe during installation.
Note: You can find a complete description of the rear panel of the PU IQE 12/38 and its connection cable in "Con-
To install the PU IQE 12/38:
1. Fit the ion source on the vacuum system.
2. Mount the PU IQE 12/38 in a 19 inch rack, or ensure that it is suitably positioned at another secure place next to
the vacuum system.
3. Connect the ground connector on the rear panel to other grounded vacuum components or to the rack. Use a yel-
low/ green striped earthing cable so that you can easily identify the connection.
4. Connect OUT1 to IN1 using a high voltage bridging cable.
5. Connect OUT2 to IN2 using a high voltage bridging cable.
6. Connect the high voltage output cable (six-pole connector, fixed to the back of the unit) to the ion source on the
chamber.
7. Connect the deflector cable (four-pole connector, fixed to the back of the unit) to the source.
8. Connect the Focus 1 and Focus 2 connectors to the source.
