9. Check the mains voltage setting on the fuse box. This must be the same as the mains voltage in your labor-
atory.
10. Check the vacuum conditions in the chamber.
2.2 Progra mming Source Specif ic Pa ra meters
The operating parameters of individual sources will vary slightly. These need to be programmed into the power supply
for best operation. You will find the operating parameters for your source in the test report.
Note: Please refer to "Front Panel Control" on page 7 for further instructions for changing parameter values.
To program the power supply with source-specific parameters:
1. Recall the data set you want to modify (#1 to #8) by pressing RECALL, then the corresponding number.
2. Choose the parameter you would like to change by pressing the corresponding key on the front panel.
3. Press MODIFY to change the parameter value (either by jog shuttle or by typing in the number (press NUM).
4. If necessary choose a different parameter to change by pressing the corresponding key.
5. Press MODIFY again to leave this mode.
6. Press STORE, then a number (data set #), confirm with STORE.
The new settings have been saved in the internal memory. You can recall the setting by pressing RECALL, then the data
set number.
To change the calibration deflection:
1. Set the power supply to OFF mode. This is the case after switching the mains switch on, but without any further
actions.
2. Press SETUP until you reach the DeflX and DeflY parameters.
3. Press MODIFY, then change the value (same way as above).
4. Leave mode by pressing MODIFY.
5. Press NUM + STORE, then press 1 and confirm with STORE.
The settings are now saved in the machine data set #1. Set #0 is the factory setting and cannot be modified. You can
recall the machine setting by NUM + RECALL, then 1.
2.3 Initia l Use
SPECS ion sources are tested before delivery. However, the first time you use your ion source, you should condition the
filament as described in the manual for your ion source. If you have replaced the cathode, you also need to perform this
conditioning procedure.
After bakeout, you should prepare the ion source with the following steps:
1. Operate the ion source in low voltage and low current modes for about ten minutes.
2. Use the Degas function (see "Degas" on page 11).
2.4 Switching On
This section describes the general procedure for using the PU IQE 12/38 with the ion source.
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April 26, 2013
PU IQE 12/383.0
Chapter 2 Basic Operation
