Chapter 2 Basic Operation
Note: If you are using the ion source for the first time, or if you have replaced the filament, please refer to
Caution!
Error messages are displayed on the front panel of the PU IQE 12/38. If you observe an error message
during the following procedure, do not attempt to continue. Switch off the unit and try to diagnose the
problem by checking "Troubleshooting" on page 35. If you need assistance, please contact
SPECS support.
To operate the ion source with the PU IQE 12/38:
1. Switch on the PU IQE 12/38.The unit will initialize in Standby mode.
2. Press the Emission key to check the filament operation. The filament current should be regulated to about 3 A.
3. Check the operating parameters:
■
Factory presets are suitable for initial operation.
■
Recall a user-defined data set by pressing the Recall button and then pressing a number key from 1 to 9.
■
Press the parameter name that is marked on the number keys to view the status of each parameter. This
does not affect the factory presets.
4. Press the Operate key. Wait until the emission regulation is stable. This state is indicated by a change from the
Busy status to Operate.
5. Open the gas leak valve at the ion source carefully and step-by-step in accordance with the instructions in your
ion source manual.
There should now be an ion current leaving the ion source, with an energy of up to 5 keV. You can measure this current
using a Faraday cup or a positively biased conducting sample.
2.5 Switching Of f
To switch off the PU IQE 12/38:
1. Press the Operate key. The PU IQE 12/38 will enter Standby mode.
2. Close the leak valve on the chamber.
3. Switch the PU IQE 12/38 off using the power switch on the front panel.
PU IQE 12/383.0
April 26, 2013
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