■
Emission
■
Energy
■
Timer
After displaying a parameter, you can change its value. You can store sets of parameter values and use them later using
the Store and Recall keys.
The following sections describe the parameters and the procedure for storing parameter sets in more detail.
3.4.1 Store and Recall
You can save up to ten sets of parameter values for later use. This allows you to set up the ion source for certain exper-
imental conditions and easily recall the operating parameters later.
There are two kinds of data type:
■
User data. These values consist of standard operating parameters used for operating the ion source. You can save
up to nine parameter sets.
■
Machine data. These values are general setup parameters for the PU IQE 12/38. You can save one set of machine
parameters.
Table 2 shows a summary of the parameters that make up user and machine data.
User data
Machine data
Parameter
Factory setting
Parameter
Factory setting
Energy
5000 V
I
Limit
5.5
Emission
10 mA
I
Standby
3.0
Extractor
95.39 %
IEEE-488 address
0
Focus 1
77.29 %
DS100 mode
0
Focus 1
77.29 %
Remote mode
HV off
Pos X
0 mm
Baud rate
1200
Pos Y
0 mm
Scan Mode
Intern
Width X
0 mm
Time Per Dot
30
μ
s/dot
Width Y
0 mm
Blanking X
1 %
Blanking Y
1%
Phi
0º
Theta
30º or 0º
Blank Level
0
L
31.5 mm
M
11.5 mm
Deflect X
48 V/º
Deflect Y
72 V/º
Table 2User and machine data parameters
Storing and Recalling User Data
To store user data:
1. Set the Energy and Emission parameters to suitable values for your experiment.
2. Press the Store button. The LEDs above the Num and Modify buttons will light.
12
April 26, 2013
PU IQE 12/383.0
Chapter 3 Front Panel Control
