OPERATION MENU’S
6.4.8
Edit Lot Id
Figure 6-34 Edit Lot Id
The “Edit Lot ID” menu is used to enter a batch name. It allows tracking of process results
to a particular process recipe and batch number.
A maximum of 16 Lot ID’s can be entered, including lot name, type and amount of wafers
and the first slot position.
To edit, proceed as follows:
Nr.
First enter the number of the lot to edit, or use the cursor control.
Press <RETURN> to proceed.
Lot Id
Enter Lot Id. Give a name with a maximum of sixteen characters.
Press <RETURN> to proceed.
Type
Enter the wafer type, by pressing <P> (=Product), <F> (=Filler) or <T>
(=Test).
Press <RETURN> to proceed.
Wafers
Enter the number of wafers, which are being used.
Press <RETURN> to go to the next Nr.
First Slot
Enter the slot’s number. Press <ESCAPE> when you are finished, or
press <RETURN> to go to the next Nr.
At any time <ESCAPE> can be pressed to return to the “Process Control Menu”. A
message “Lot ID stored” will appear to confirm any changes made.
6.5 Monitor
The monitor menus are used to display the current (process) status of the tube. The monitor
menu does not require a username and password and can be used by anyone.
T
OUCHSCREEN
R
EFERENCE MANUAL
6-35
