Tempress Systems M440-01, Reference Manual

Page 1: ...Touchscreen Reference Manual Tempress Systems Inc Touchscreen manual M440_01 January 2004...

Page 2: ...This page intentionally left blank...

Page 3: ...6 1 2 Access start on another recipe STEP 6 5 6 1 3 Buzzer status ON OFF 6 5 6 1 4 Set Date and Time 6 5 6 1 5 Tube control mode 6 6 6 1 5 1 Start Recipe Control 6 6 6 1 5 2 Select Recipe Control 6 7...

Page 4: ...t Stop Process Recipe 6 30 6 4 3 Abort Process Recipe 6 31 6 4 4 Clear Alarms 6 32 6 4 5 Variable Process Command 6 32 6 4 6 Select a Process Recipe 6 33 6 4 7 Assigns Control Zones to Paddle Inputs 6...

Page 5: ...ut 6 11 Figure 6 12 Analog Inputs 6 12 Figure 6 13 Digital Outputs 6 12 Figure 6 14 Digital Inputs 6 13 Figure 6 15 Messages 6 13 Figure 6 16 Graphic System Layout 6 14 Figure 6 17 DTC Certification M...

Page 6: ...Status 6 37 Figure 6 37 Branch status 6 38 Figure 6 38 Alarm Status 6 39 Figure 6 39 Digital Output Input Status 6 39 Figure 6 40 DPC Lot Id Status 6 40 Figure 6 41 Process Recipe Status 6 41 Figure...

Page 7: ...ystem control and easy alteration of parameters As well as displaying the required information its unique touchscreen facility makes the input of data easier than ever before Its compact design and ph...

Page 8: ...the DTC memory Programs of up to 768kB 3 x 256kB can be written to control the display and house the menus and screens This program is contained in the on board EPROMS menu driven The firmware provid...

Page 9: ...play The Front Panel Display is an old user interface with a keypad and a one line display There is one Front Panel Display for each Digital Controller DPC and DTC The size and the shape of the new to...

Page 10: ...Secure the touchscreen with the screws It is now ready for starting 10 Turn the tube switch on The Main Menu should appear after about 10 seconds Figure 3 1 Location of Connectors TOUCHSCREEN REFEREN...

Page 11: ...6 Temperature Status 7 Graphic Process Status PROCESS CONTROL MENU 1 Graphic Process Control 2 Start Stop Process Recipe 3 Abort Process Recipe 4 Clear Alarm 5 Variable Process Command 6 Select a Pro...

Page 12: ...moved to any position in the current field CAP This is a shift lock key and will cause all subsequent data to be input in lower case Press a second time to revert to upper case one line of digits is...

Page 13: ...e menus are ordered in a security hierarchy being the top menu the highest security level and the bottom menu the lowest security level 1 System Control There are five security levels to the touchscre...

Page 14: ...he Normal recipes are used for regular processing The Abort recipes can be used to automatically handle possible dangerous situations 4 Tube Control The Tube Control Menu is used to start stop or abor...

Page 15: ...een It is recommended to set these settings first Once the other access rights have been changed the System will not allow access to a second level menu without a name and password Once the NAME and P...

Page 16: ...passwords visible 1 System Master To change the name of the highest level of access 2 System Engineer To change the name of the second level of access 3 Process Engineer To change the name of the thir...

Page 17: ...warnings The buzzer can be completely switched off with this menu item Alarms will still be visible in the bottom line of the touchscreen ON Every time an alarm appears on the TOUCHSCREEN the buzzer...

Page 18: ...ube Control Mode Menu 6 1 5 1 Start Recipe Control Start Recipe Control mode allows 4 levels of authority concerning the tube control by TSC II or Touch Screen REMOTE TSC Tube control is only possible...

Page 19: ...ipe selection via the TSC II as well as the Touch Screen is not possible LOCAL Touch Screen Recipe selection is only possible via the Touch Screen 6 1 5 3 Normal Maintenance Mode This mode has two opt...

Page 20: ...be Certification Menu This submenu gives access to the DPC and the DTC certifications 1 Process Controller Certifications To change the certifications of the Digital Process Controller DPC 2 Temperatu...

Page 21: ...change the parameters of any of the analog outputs or interlocks between analog and digital outputs 4 Analog Inputs To change the parameters of the analog inputs 5 Digital Outputs To change the param...

Page 22: ...the range 0 to 9 6 2 1 2 Tube Configuration Figure 6 10 Tube Configuration DPC This screen enables the selection of the number of recipes boat parameters and the pressure control parameters The new va...

Page 23: ...ey to move down or the key to move up Enter the correct value and confirm with the RETURN key To move the cursor to the right or left without altering any digits use and Press ESC to return to the DPC...

Page 24: ...wn on the line above the keyboard When all the alterations have been made press ESCAPE to return to the DPC Certification Menu 6 2 1 5 Digital Outputs Figure 6 13 Digital Outputs This submenu defines...

Page 25: ...re than sixteen digital inputs press N to display the next sixteen combinations 6 2 1 7 Messages Figure 6 15 Messages This screen displays the current messages and the message number to which they are...

Page 26: ...used to design the tube type the pressure valves the pump valve the vacuum valves the top tube line valves and the bubbler It is used in combination with the screen Graphics 2 This one is used to dra...

Page 27: ...e modified here 2 Normal Temperature Table The process temperatures are predefined in the Normal Temperature Table A maximum of sixteen individual temperature recipes are available 3 Profile Temperatu...

Page 28: ...error is made the cursor can be moved back to a value using the key The and allow the cursor to be moved to the left or right within the current parameter without altering any digit Spike Thermocouple...

Page 29: ...een 0 0 no limitation and 25 5 C min controlled Maximum Profile Deviation The maximum profile deviation is a limit used for profiling the tube When profiling the temperature must be at its setpoint wi...

Page 30: ...RC to scroll up and down When the desired recipe number has been selected press RETURN to fill in its parameters Temperature Setpoint Enter the Temperature Setpoint for each zone Each entry must be i...

Page 31: ...addition the behaviour of the different temperature control zones can be modified Default the temperature zones are independently controlled to provide the fastest result If so desired the center zone...

Page 32: ...atically when the automatic profiling procedure is performed I nsert This enables a profile temperature recipe to be inserted into the table All the other lines in the table are moved down one line E...

Page 33: ...ues the range and its unit 6 2 2 5 PID Parameter Table Figure 6 22 PID Parameter Table The PID parameter table defines the proportional integral derivative and gain parameters for the spike TC s and t...

Page 34: ...ted zones When the boat is moved in the latent heat provided by this DTC action results is a large temperature overshoot and subsequent longer stabilization times With the maximum spike correction tab...

Page 35: ...e current recipe has been preselected for editing If you want to edit the current recipe just press RETURN To return to the Main Menu press ESCAPE 6 3 1 Edit a Process Recipe Figure 6 25 Recipe Editor...

Page 36: ...he new lines Press 3 and Enter LINE number to insert 4 Delete The Delete mode allows a command line or a complete process step to be deleted Press 4 followed by the line number which have to be delete...

Page 37: ...ipe 0 STEP Allows the user to enter the step number to which the cursor needs to move to directly 6 4 Tube Control Figure 6 26 Process Control Menu The Process Control Menu provides the main items to...

Page 38: ...llow a current recipe to be continued when it has been paused can be done with this instruction These include starting from step 0 or continue at a Wait for Operator command Optionally a direct select...

Page 39: ...ble process command is a list of preselected process parameters that have been assigned to be variable This list allows rapid change of setpoints without the use of the Recipe Editor 6 Select a Proces...

Page 40: ...buttons on the left Any alarm messages will be displayed in the bottom line The process recipe field shows The tube Id and name The recipe Id and name The message for the current step The action for w...

Page 41: ...used Open Valve Flow Meter Closed valve Pump Fine Metering Valve FM Tube Mass Flow Controller Orifice Baratron Up to four graphical screens can be setup to fully match the tube hardware Each screen c...

Page 42: ...stop the timer in a particular process step The current process status is presented in the center screen It includes process recipe id and name optional variable time the current process step and its...

Page 43: ...create a safe situation In the event that step 0 can not be used to create safe conditions which is common in a production environment where a minimum of operator handling is required the use of abort...

Page 44: ...ally removes the alarm from the current alarm list it will be stead in the process alarm list for review This is however not valid for the Abort Alarm The Abort Alarm can only be removed by the Clear...

Page 45: ...be presented in the list of Variable Commands if that menu is selected Press ESCAPE to store the new settings and return to the Process Control Menu A brief 3 second message Process variable commands...

Page 46: ...curate temperature are required or the automatic profiling recipes is to be performed the paddle TC s can be assigned to be used as input signals to the DTC the Assign Control Zones to Paddle Inputs m...

Page 47: ...of sixteen characters Press RETURN to proceed Type Enter the wafer type by pressing P Product F Filler or T Test Press RETURN to proceed Wafers Enter the number of wafers which are being used Press R...

Page 48: ...process 3 Digital Output Input Status This contains the settings of all Digital Outputs and all Digital Inputs including the ON OFF status and alarm monitoring 4 DPC Lot Id Status This contains the L...

Page 49: ...output for all profile recipes 9 Paddle Correction Status This contains the calibrated paddle correction table the spike and paddle PID and gain parameters and the type of thermocouple the maximum pr...

Page 50: ...ress NEXT ANALOG CHANNELS The actual gasflow settings and other analog input signals are presented Analog I O are controlled by the DPC Analog Inputs are externally controlled and only monitored A ana...

Page 51: ...me list of all possible alarms If an alarm condition is reset it will be removed from the current list The process alarm list contains all the alarms that have occurred during one process run When an...

Page 52: ...the signal is not monitored and a change of signal does not result in any alarm INPUTS Is to display the inputs OUTPUTS Is to display the outputs Press ESCAPE to go back to the Monitor Menu 6 5 4 DPC...

Page 53: ...number Press NORMAL to select the normal process recipe or ABORT to select the abort recipe Select the appropriate number followed by RETURN The contents of the selected recipe will be presented in t...

Page 54: ...age of the recipe 3 Move to the previous page of the recipe 4 Move to the last page of the recipe 5 Move to a specified step of the recipe The desired step number must be entered 6 Return to the recip...

Page 55: ...on A contains the tube name and number The second section B contains the paddle and spike setpoint and actual value the deviation between setpoint and paddle actual value the final temperature destina...

Page 56: ...o the Monitor Menu 6 5 6 2 Normal Recipe Status Figure 6 45 Normal Recipe Status The normal recipe status menu presents the contents of the normal temperature table The mainscreen contains for all tem...

Page 57: ...ure recipes If more than 3 zones are present the values for the remaining zones can be viewed by pressing NEXT only displayed in case there are more than 3 zones The bottom section also contains the b...

Page 58: ...ofile deviation Press ESCAPE to go back to the Monitor Menu 6 5 7 Graphic Process Status Figure 6 48 Graphic Process Status The Graphic Process Status gives a graphical overview of the current tube st...

Page 59: ...on speed 0 100 in steps of 10 Variable command 2 GAS PRESSURE Gas type 1 to 16 DEPENDING ON HARDWARE Setpoint Variable command 3 ALARM 1 ON Gas Pressure 0 FOR ALL 1 to 16 DEPENDING ON HARDWARE Alarm l...

Page 60: ...h boat position 8 Wait for Digital Inputs Select inputs 1 1 to 8 2 9 to 16 3 17 to 24 4 25 to 32 Activate each input 9 Wait for gas pressure Select gas or pressure 1 16 10 Wait for Analog input Select...

Page 61: ...temperature alarm Step number 0 99 Sonalert alarm 2 On boat alarm Step number 0 99 Sonalert alarm 3 On any alarm Step number 0 99 Sonalert alarm 4 On wait alarm Step number 0 99 Sonalert alarm 5 Subr...

Page 62: ...On temperature alarm 2 On boat alarm 3 On any alarm 4 On wait alarm 5 On gas pressure alarm 1 1 to 8 2 9 to 16 activate gas pressure on which to abort 6 On Digital Input alarm Select inputs 1 1 to 8 2...