START-UP
Note: do not touch the wafers. If a wafer is touched or dropped on the floor, don’t use this
wafer for processing.
BOAT IN
In this step the boatloader moves to the boat in position (system dependent) at the
programmed speed (adjusted in mm/min).
STABILIZE
In this step the system will be settled to simulate the desired process environment. This is
important for accurate temperature control. The heat transfer from heating element to tube
to wafers and paddle will (slightly) differ for atmospheric and low pressure environment. The
same is valid for a dry or wet environment. Typically 2 tables are used in an atmospheric
process tube, one for ‘dry environment’ and one for ‘wet environment’. For LPCVD
applications only ‘low pressure environment” is sufficient and can be obtained using N
2
as
the ‘process gas’.
PROFILING
The system is given 3 hours (default) to reach a selected temperature and keep the setpoint
within limits for 20 minutes.
The temperature is selected from the Profile Temperature Table (default A) as a Profile
Temperature Recipe. The system will control the temperature until the setpoint has been
reached. When the setpoint has been reached within limits a timer is started (Default limit is
0.5
o
C, changeable in Certifications-submenu-Temperature Controller Certifications-
submenu-Tube configuration-maximum profile deviation on a
touchscreen
, for
TSC-2
it
can be found at Tube level – System menu – DTC Setup – DTC configuration – ProfDev
column. Do not forget to write to DTC after changing in
TSC-2
).
For 20 minutes the temperature needs to be within these limits. If the temperature falls
outside the limits the timer is reset. After 20 minutes of successful stabilization the
Spike
Value
will be stored in the Profile Temperature Table (default A) first. Then the required
Power Output
will be stored and the Profiling Step is finished. Subsequently the system will
continue to the next process step.
The
Power Output
will be used automatically to finish a normal process run in case of a TC
failure.
If, for some reason, the automatic profiling is not finished after 3 hrs a
Wait for temperature
alarm will be generated and the system will wait for either the temperature to reach the
setpoint within limits or an operator to abort the process.
COOLDOWN
After the automatic profiling run the system will cool down. The temperature will ramp
down in the adjusted range in
0
C/min.
STANDBY
The system is waiting for the operator to return. This is especially convenient when the
automatic profiling run has been started over night. The system is put into a safe condition.
The operator needs to press <START> to continue. Optionally this step can be removed to
have the system automatically take the wafers outside the tube.
BOAT OUT
In this step the boat loader moves to the boat out position (10 mm) with the programmed
speed (mm/min). If the oscillation field is 0 (zero) the boat stops when it reaches the
position, otherwise the boat loader oscillates at the programmed speed with an oscillation
span of 12mm. The latter is applicable for wheelpaddles in a CVD system only.
F
URNACE
R
EFERENCE
M
ANUAL
4-10