INTRODUCTION
1.Introduction
1.1 Scope of the manual
The contents of this manual and drawings are to provide the necessary instructions and
information for installing, adjustment, operating, maintenance and understanding of the
Amtech/Tempress Systems Furnace. Before starting up, installing, operating and/or
maintaining the system, read this manual first.
1.2 Furnace
models
This manual is meant for the following Tempress Diffusion models:
Model number
Wafersize
Capability
Nr of tubes
Flat-zone length
TS-6300 series
TS-6303
TS-6304
150 mm
3
4
25-30 cm
(12 inch)
TS-6600 series
TS-6603
TS-6604
150 mm
3
4
55-60 cm
(24 inch)
TS-6800 series
TS-6803
TS-6804
150 mm
3
4
75-80 cm
(32 inch)
TS-61000 series
TS-61003
TS-61004
150 mm
3
4
95-100 cm
(40 inch)
TS-8600 series
TS-8603
TS-8604
200 mm
3
4
55-60 cm
(24 inch)
TS-81000 series
TS-81003
TS-81004
200 mm
3
4
95-100 cm
(40 inch)
TS-12800 series
TS-12803
TS-12804
300 mm
2
3
75-80
(32 inch)
Table 1 Different types of furnace models
F
URNACE
R
EFERENCE
M
ANUAL
1-1