Thermo Scientific 3490M, Manual

Page 1: ...Class 100 Clean Room Ovens Operating Manual and Parts List LT1476X7 Rev 0 Visit us online to register your warranty www thermoscientific com MBCwarranty ...

Page 2: ...IPTION By Preface Clean Room Oven i Models covered in this manual Models Size Voltage With HEPA Filter 3490M 6879 2 6 cu ft 120V 3490M 1 6880 2 6 cu ft 240V 3492M 6881 2 6 cu ft 120V 3492M 1 6882 2 6 cu ft 240V 3494M 1 6883 2 6 cu ft 240V 3495M 1 6884 3 6 cu ft 240V 3496M 1 6885 2 8 cu ft 240V X 3497M 1 6886 2 8 cu ft 240V X 3498M 1 6887 4 6 cu ft 240V 3499M 1 6888 4 6 cu ft 240V ...

Page 3: ...ustments and maintenance must be performed by qualified service personnel Material in this manual is for information purposes only The contents and the product it describes are subject to change without notice Thermo Fisher Scientific makes no representations or warranties with respect to this manual In no event shall Thermo be held liable for any damages direct or incidental arising out of or rel...

Page 4: ...he equipment that has been put on the market after 13 August 2005 This product is required to comply with the European Union s Waste Electrical Electronic Equipment WEEE Directive 2002 96 EC It is marked with the WEEE symbol Thermo Fisher Scientific has contracted with one or more recycling disposal companies in each EU Member State European Country and this product should be disposed of or recycl...

Page 5: ... parts or provide you with on site service We can also provide you with a quotation on our Extended Warranty for your Thermo Scientific products Whatever Thermo Scientific products you need or use we will be happy to discuss your applications If you are experiencing technical problems working together we will help you locate the problem and chances are correct it yourself over the telephone withou...

Page 6: ... 1 Stacking Units 4 1 Electrical Power 4 2 Baking Out the Oven 4 2 Cleaning 4 2 Shelf Installation 4 2 Leveling 4 2 Door Adjustment 4 3 Gas Connection 4 3 Latch Adjustment Door Hard to Open 4 4 Latch Adjustment Door Against Gasket 4 4 Latch Adjustment Heating Door Opens 4 5 Features 5 1 Control Panel 5 1 Section 1 Section 2 Section 3 Section 4 Section 5 ...

Page 7: ...Existing Program 6 7 Hb Holdback 6 8 CYC n Setting the Number of Cycles 6 9 dwL U Setting Dwell Units 6 9 rmP U Setting Ramp Units 6 9 Setting the Segment Type 6 10 Setting the Target Setpoint 6 13 Cancelling a Program 6 13 Holding a Program 6 13 Running a Program 6 13 Tuning Your Oven 6 14 Tuning Error 6 14 Gain Scheduling 6 14 Autotuning 6 15 Adaptive Tuning 6 16 Maintenance 7 1 Door Gasket Repa...

Page 8: ... mode Mechanical air circulation provides optimum temperature uniformity and rapid recovery after door openings Two systems protect oven contents against overheating An alarm setpoint programmed in the controller initiates a visual signal in the event the actual temperature exceeds the limit In addition a second system is an independent hydraulic thermostat set by the operator to a temperature sli...

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Page 10: ...ty and safety in mind It is your responsibility to install it in conformance with local electrical codes It is most important that the user follow installation instructions exactly as written Failure to do so is likely to lead to improper operation erroneous calibrations and possible damage to the equipment Do not attempt operation without this information ...

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Page 12: ... 3494M 1 3495M 1 0 1 C 0 2 C 3496M 1 3497M 1 0 2 C 90 C 3498M 1 3499M 1 0 1 C 0 2 C Temperature Uniformity Model 100 C 200 C 3490M 1 3492M 1 1 0 C 2 0 C 3494M 1 3495M 1 1 0 C 2 0 C 3496M 1 3497M 1 1 5 C 90 C 3498M 1 3499M 1 1 0 C 2 0 C Model Volts AC Watts Amps Heaters 3490M 3492M 120 1900 15 8 2 3490M 1 3492M 1 220 240 1900 7 9 2 3494M 1 3495M 1 220 240 3100 12 9 2 3496M 1 3497M 1 220 240 3100 12...

Page 13: ... 4 wafer boats filled with wafers and evenly distributed in the oven A thermocouple measured wafer temperature in the center wafer boat Time recorded equals elapsed time for wafer temperature to reach 90 of setpoint 150 C Note Performance measured under controlled laboratory conditions Your oven s performance may be slightly different depending on application Dimensions 3490M 1 3492M 1 Interior 13...

Page 14: ...W x 24 1 4 D x 35 H 80 x 62 x 89 cm Capacity 4 6 cubic feet Weight net 3490M 1 3492M 1 180 lbs 81 8 kg 3494M 1 3495M 1 220 lbs 100 0 kg 3496M 1 3497M 1 202 lbs 91 8 kg 3498M 1 3499M 1 234 lbs 106 4 kg Environmental Conditions Pollution Degree 2 Installation Category II Altitude 2000 meters MSL mean sea level Humidity 80 maximum non condensing Electrical supply 120VAC or 240VAC Voltage tolerance 10...

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Page 16: ...damage inspection promptly BE ADVISED Ovens must be cleaned and baked out prior to use in clean rooms Note Disconnect unit from the power source when not in use Place the oven where it is to be operated in an area away from drafts Provide enough clearance to allow free air movement around the oven Leave clearance at the rear for gas connection and adjustment of air vent Position the unit with room...

Page 17: ... prior to clean room use should wear disposable polyethylene gloves to prevent skin oils from contaminating the oven surfaces Use a lint free soft paper manufactured for clean room maintenance Remove shelves floor and inside side walls from oven and clean thoroughly Clean interior chamber including heaters blower wheel and very gently the sensor tube Move the oven into the clean room and follow in...

Page 18: ...t these components 2 Remove the pivot bolt and flat washer from the top door hinge 3 Unlatch the door handle to release the door then slide the door out and off the bottom hinge pivot bolt to gain access to hinge screws 4 Slightly loosen hinge screws on top and bottom hinges so hinges require firm hand pressure to reposition DO NOT REMOVE HINGE SCREWS complete removal of screws will make it extrem...

Page 19: ... If the door is too hard to open follow the procedure below to adjust the latch 1 Open the door Use 5 64 Allen wrench to remove the Allen setscrew from the door strike assembly 2 Rotate catch mechanism counterclockwise to increase length and thereby position door a little farther away from the body of the oven The number of turns will have to be estimated Reinsert and tighten Allen setscrew secure...

Page 20: ...otate catch mechanism counterclockwise to increase length and thereby position door a little farther away from the body of the oven The number of turns will have to be estimated Re insert and tighten Allen setscrew securely 3 Repeat if necessary to achieve satisfactory operation Depending on operating temperature the procedure may have to be repeated to ensure proper door operation Clean Room Oven...

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Page 22: ...mer controller should fail 4 Hi Limit Thermostat Status Lamp When lit this red lamp signals that the temperature is exceeding the hi limit setpoint established by the user 5 Programmer Controller 4 button operation controller allows user to set and control operating temperature and program ramp to setpoint procedures operating details follow in the upcoming OPERATION section Control Panel RUN HOLD...

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Page 24: ...er consists of a microprocessor based three mode PID Proportional Integral Derivative programmable temperature controller with over temperature protection and appropriate output switching devices to control the oven The digital readout continuously displays chamber upper display and setpoint lower display temperatures unless the SCROLL or PAGE button is depressed The programmable controller can be...

Page 25: ...and then release the button From the HOME DISPLAY press the SCROLL button The display will briefly show the temperature units in C F K and then return to the HOME DISPLAY if a different temperature unit is required call Technical Services 6 2 Clean Room Oven Thermo Scientific Section 6 Programmable Models Basic Operation Output 1 PAGE Button AUTO MAN Button Display Window Upper Display Lower Displ...

Page 26: ...information RUN HOLD Run Hold button Starts a program when pressed once RUN light illuminates Holds a program when pressed again HOLD light illuminates Cancels hold and continues running when pressed again HOLD light is off and RUN light illuminates Exits a program when the button is held down for two seconds RUN and HOLD lights are off At the end of a program the RUN light will flash During holdb...

Page 27: ...program on hold HbAc waiting for process to catch up End program completed in the lower display The controller will default to OFF FASt Fast run through program no YES The controller will default to no SEG d Flash active segment type in the lower display of the home display no YES The controller will default to no ProG LiSt Program Edit List PrG n Press the UP or DOWN ARROW to select the program n...

Page 28: ...int at a set rate rmp t ramp time ramp to a specified temperature in a set time dwEll to maintain a constant temperature for a set time StEP climb instantaneously from current to specified temperature cALL to call a program as a subroutine available only on 4x16 programmable models The controller will default to End Other parameters used with tYPE include tGt target setpoint Rate rate of temperatu...

Page 29: ...settings and may vary if you have changed the configuration of your controller IDHi 0 C 2FSH 250 C IdHi PV deviation high alarm 2FSH PV full scale high alarm LCr load current low alarm HCr load current high alarm S br Sensor break check that sensor is connected correctly L br Loop Break Check that the heating circuits are working properly Ld F Heater Circuit Fault indication of either an open or s...

Page 30: ...tinuously To create a customized program using the controller parameters listed under Controller Parameters at the beginning of this section follow the procedures outlined in the proceeding sections of this manual This procedure is for 4x16 Segment Programmable Models only The same steps are used when creating a new program and editing an existing program with the exception being that a new progra...

Page 31: ... bAnd Deviation Band Holdback combines the features of the high and low deviation holdback in that it holds the program back when the process variable deviates above or below the setpoint by more than the holdback value To set the holdback type 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads Hb 3 Press the UP or DOWN button to toggle...

Page 32: ... list ProG LiSt 2 Press the SCROLL button until display reads dwL U 3 Press the UP or DOWN button to toggle between seconds minutes and hours Set the number of times a group of segments or programs are to be repeated by following the steps listed below 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads CYC n 3 Press the UP or DOWN butto...

Page 33: ...5 are used in the 4 x16 segment program model only If using an 8 segment program skip to Step 6 4 Press the SCROLL button until display reads Hb 5 Press the UP or DOWN button to toggle between bAnd Hi Lo and OFF 6 Press the SCROLL button until display reads tGt 7 Press the UP or DOWN button to set a target setpoint 8 Press the SCROLL button until display reads rAtE 9 Press the UP or DOWN button to...

Page 34: ...N button until display reads dwEll 4 Press the SCROLL button until display reads dur 5 Press the UP or DOWN button to select a time in dwell units seconds minutes or hours set in the dwL U parameter StEP To climb instantaneously from the current temperature to a specified temperature 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tY...

Page 35: ...LL button until display reads PrG n 5 Press the UP or DOWN button to select a program number to be linked 6 Press the SCROLL button until display reads CYC n 7 Press the UP or DOWN button to select the number of cycles the linked program is to be run End To end or repeat a program 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tYPE ...

Page 36: ... the RUN light will illuminate or 1 Press the PAGE button until you reach the run list run LiSt 2 Press the SCROLL button until display reads PrG 3 Press the UP or DOWN button to select the program number you want to run 4 Press the RUN HOLD button once to start the program The RUN light will illuminate To put a running program on hold press the RUN HOLD button The HOLD light will illuminate To ca...

Page 37: ...ash tu ER if an error occurs during tuning To clear the error and restart tuning simultaneously press the PAGE and SCROLL buttons and follow the steps outlined in Autotuning Note To stop the tuning function simultaneously press the PAGE and SCROLL buttons The display will flash tu ER if an error occurs during tuning To clear the error and restart tuning simultaneously press the PAGE and SCROLL but...

Page 38: ...erted into the SEt 1 set and if the process value is above G SP the calculated values will automatically be inserted into the SEt 2 The Autotune feature automatically sets up the PID values in the control parameters to suit new process conditions To tune your oven using autotuning 1 Load your oven with a load similar to your normal load and close the door 2 Set the setpoint temperature 3 Press the...

Page 39: ...sed by a one shot tune To tune your oven using adaptive tuning 1 Load your furnace with a load characteristic of those you intend to heat in it 2 Press the PAGE button until display reads Atun LiSt 3 Press the SCROLL button until drA OFF is displayed 4 Press the UP or DOWN button to select on 5 Press the SCROLL button until drA t is displayed 6 Press the UP or DOWN button until the desired trigger...

Page 40: ...If assistance is needed beyond what the distributor can provide call the Technical Services Department No merchandise however should be returned directly to the manufacturer without prior approval Remove oven from clean room area If the door gasket is nicked or has a small tear the gasket may be repaired with RTV Sealant 3145 part 120 053 00 Form the sealant to the proper shape in the case of a ni...

Page 41: ... inner body replace floor side walls and shelves 1 Disconnect unit from electrical outlet 2 In the event unit has been in use be certain that it has cooled before doing any work in the interior 3 Filter cover is on the right hand side of interior of cabinet 4 Remove shelves 5 Locate and remove 2 screws on front of filter cover one at top and the other at the bottom 6 Note flange of filter cover wh...

Page 42: ...6X4 Fan Motor 240V MT1476X3 Fan Motor Blower 370 264 00 Filter HEPA 3497M 1 525 036 00 Filter Inline 3497M 1 525 034 00 Fuses 3490M 1 330 298 00 All Other Models 330 299 00 Fuse Holder 330 297 00 Gasket order length by model number 530 180 00 Heaters 3490M 3490M 1 340 244 00 3495M 1 3497M 1 3499M 1 340 231 00 Rubber Feet 4 790 078 00 Sealant Dow Corning 736 120 080 00 Sensor Assembly 014 186 00 Sh...

Page 43: ...l Services Department Prior to returning any materials please contact our Technical Services Department for a Return Materials Authorization number RMA Material returned without an RMA number will be refused DESCRIPTION PART NUMBER Status Lamps Green 360 238 00 Red 360 234 00 Status Lamp Base Power Green PL1476X1 Status Lamp Base Hi Limit Red PL1448X1 Switch Power 440 226 00 Temperature Controller...

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