QS15 & QS20 Series Galvo Scanners
Chapter 5: Specifications
Page 6
MSTN000968-D02
Chapter 5
Specifications
5.1.
Galvo Scanner Specs
Item # Prefix
QS15
QS20
Max Beam Diameter
15 mm
20 mm
Mirror Substrate
Fused Silica
Step Response Time (0.4° Optical)
600 µs
650 µs
Mechanical & Electrical Specifications
Rated Excursion
±22.5° Optical
a
Rotor Inertial Load
Recommended
1.8 g·cm
2
Max
9 g·cm
2
Torque Constant
180 000 dyne·cm/A
Coil Resistance
3.0 Ω
Coil Inductance
530 µH @ 1 kHz
Position Detector
Type
Optical
Linearity
99.8% @ ±20°
Gain Drift
50 ppm/°C
Offset Drift
30 µrad/°C
Repeatability
10 µrad
Output Signal (Typ.)
Differential Mode
7.1 µA/° Optical
Common Mode
385 µA
Supply Current
30 - 40 mA
General Specifications
Operating Temperature
0 to 40 °C (Non-Condensing)
Storage Temperature
-10 to 50 °C
Servo Shaft Size
Ø22 mm x 50 mm
a. The optical angle is 2x the mechanical angle.
5.2.
Mirror Coating Specs
Item # Suffix
-AG
-Y3
-Y1
-CD
Coating Type
Protected Silver
Hard Dielectric for
Nd:YAG Laser
3rd Harmonic
Hard Dielectric for
Nd:YAG Laser
Fundamental
Dielectric on Metal
for CO
2
Laser
Absolute
Reflectance
≥92% (450 - 500 nm)
≥94.5% (500 - 2000
nm)
≥98% (2 - 10.6 µm)
≥99% (355 nm)
≥80% (633 nm)
≥98% (1064 nm)
≥80% (633 nm)
≥99.5% (10.64 µm)
≥80% (633 nm)
Surface Quality
(Scratch-Dig)
40-20
20-10
40-20
40-20
