Ulvac C10T, Instruction Manual

Page 1: ...xport Trade Control Order which is based on international export control regimes Also when applying a refrigerator system to a cryocooler for optical sensors the cryocooler falls under row 10 2 of appended table 1 of Japan s Export Trade Control Order as well Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when ...

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Page 3: ... where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the personnel should be familiar with handling a cryopump in order to use it safely Since we offer a training session which is subject to fees as needed for people who use cryopumps for the first time please ...

Page 4: ...owns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disasters such as fire earthquake flood lightning salt damage and so on environmental pollution irregular voltage and or usage of undesignated power source Breakdowns that are outside the terms of warranty C...

Page 5: ...isplay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to give us information about the presence of the hazardous substance and or contaminant Also please be aware that we do not accept liability for damages by the contaminant which might be caused during tran...

Page 6: ...sfer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the specification change and the improvement of the product 3 If you have any questions or comments on this document please do not hesitate to contact us The phone numbers of local customer support centers ...

Page 7: ...could result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a risk of severe injury upon contact Corrosive chemicals used There is a risk of severe injury upon contact Flammable gas used There is a danger of fire or burn injury Explosive gas used There is a risk o...

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Page 9: ...Piping 3 2 3 3 Cooling Water 3 2 3 4 Connecting the Compressor Unit to the Cryopump 3 5 3 5 Connecting Electrical Cables 3 7 4 OPERATION 4 1 4 1 Before Operation 4 1 4 2 Normal Operation 4 1 5 Disconnection and Storage 5 1 5 1 Disconnecting Flexible Hose 5 1 5 2 Storage 5 2 6 MAINTENANCE 6 1 6 1 Scheduled and Unscheduled Maintenance 6 1 6 2 Charging Helium Gas 6 1 Appendix A Trouble Shooting A 1 A...

Page 10: ...Compressor Installation 3 8 Figure 5 1 Disconnecting Flexible Hose 5 2 Figure 6 1 Charging Helium Gas 6 4 Figure B 1 C10T Circuit Diagram B 3 Figure B 2 C10T Wiring Diagram B 5 Figure D 1 C10T Flow Diagram D 2 Tables Table 1 1 Compressor Unit Standard Specifications 1 1 Table 2 1 Shipping List 2 1 Table 2 2 Optional Parts 2 1 Table 3 1 Recommended Cooling Water for Compressor 3 3 Table 3 2 Input P...

Page 11: ...e helium gas more than the defined amount When charging helium gas or performing helium line decontamination refer to the Maintenance section and follow the instruction Use regulators charging hoses or adopters that can be used at the pressure of 2 0MPaG or higher when performing the above work Do not start stop the operation frequently The number of times that compressor motor can be started stop...

Page 12: ...c Techno Ltd to have it picked up or send it directory to our Service Engineering Division We only accept CTI adsorbers and our adsorbers Power supply voltage must be kept within the allowable range refer to Section 1 Table1 1 Compressor Unit Standard Specifications Applying more than the allowed voltage may damage the equipment Install a ground fault circuit interrupter rated current 10A rated tr...

Page 13: ...r to Section 3 Table 3 1 Recommended Cooling Water for Compressor The upper limit of the compressor operating ambient temperature is 38 Do not use the compressor in unsuitable environments such as dusty highly humid environments and or places that are affected by strong electromagnetic waves Keep electric terminals free from dust to avoid electrical leakage and or a short circuit 1 Installation an...

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Page 15: ...dsorber coupling such as our charging adaptor for cryocooler maintenance 2 Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step Disposal Considerations Disposal of our products must be done in accordance with applicable national and local laws and regulations The cryopumps or cryocoolers may contain residue of hazardous substances resul...

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Page 17: ...0Hz AC190 230V 3Φ 60Hz Power in normal operation 1 1 5kW 1 7kW 50Hz 60Hz Nominal Operating Current 1 5A 6A 50Hz 60Hz Cooling Type Water cooled Cooling Water Requirement See Fig 3 2 Temperature 5 32 C Flow Rate 1 5L min Pressure Drop 0 01 0 072MPa Ambient Temperature 10 38 C Compressor Winding Resistance 3 04Ω Adsorber Periodic Replacement Not necessary Weight 69kg Cooling Water Inlet Outlet Rc3 8 ...

Page 18: ...hose dedicated to C10 If a standard hose of the same length is used helium charge pressure will be lower than required inviting the need for charging helium gas CAUTION 3 Operating pressure is expected when a flexible hose of 3m are used The operating pressure will be larger by 10 with a hose of 20m Applicable Model of Cryopump and Refrigerator unit Cryopump U8HT Refrigerator R10RT RM10T Connector...

Page 19: ...Compressor Unit Instruction Manual Dimensions FRONT SIDE REAR Figure 1 1 Dimensions 332 521 543 573 148 76 2 108 3 399 111 104 57 2 ULVAC CRYOGENICS INCORPORATED 1 3 ...

Page 20: ...ts Control Panel Elapsed Time Meter Helium Supply Pressure Gauge ON OFF Switch Helium Charge Valve Fitting Front Panel REMOTE RESPONSE Connector Cold Head Connector REMOTE LOCAL Switch Power Connector Helium Gas Supply Connector Helium Gas Return Connector Cooling Water Inlet Rc3 8 Cooling Water Outlet Rc3 8 Circuit Protector Fuse CP1 CP2 FUSE 1A Charging valve and fitting are on the other side of...

Page 21: ... for the details Depending on your specification the optional part s in Table 2 2 is attached Table 2 1 Shipping List Item Quantity Compressor Unit 1 This Instruction Manual 1 Fuse 250V 1A 1 Metal Connector External signal Remote 1 Table 2 2 Optional Parts Item Quantity Input Power Cable 1 25mm2 4cores 3m or customized length 1 Three Phase Refrigerator power cable 0 5mm2 4cores 3m or customized le...

Page 22: ...Piping Flexible Hose 2 3 Connecting Piping Flexible Hose Do not forcibly bend flexible hoses at a sharp angle the minimum allowable bend radius is 250mm Failure to observe this precaution may result in damage to the flexible hose Do not forcibly bend flexible hoses at a sharp angle the minimum allowable bend radius is 250mm Failure to observe this precaution may result in damage to the flexible ho...

Page 23: ...nstallation 1 Place the compressor unit on a level floor within 5º 2 The compressor unit must be operated in proper room temperature 10 C 38 C Avoid dust and moist 3 Leave the spaces as shown in Figure 3 1 to make the following maintenance processes easier Pressure gauge inspection Gas charge valve operation Adsorber replacement 500 500 543 1543 332 432 50 50 Figure 3 1 Maintenance Space Unit mm U...

Page 24: ...the allowable range as shown in Fig 3 2 Always use the proper cooling water that meets the requirement Keep the cooling water supply pressure less than 0 7MPaG 1 Determine the cooling water flow rate within the allowable range as shown in Fig 3 2 Always use the proper cooling water that meets the requirement Keep the cooling water supply pressure less than 0 7MPaG If the temperature of cooling wat...

Page 25: ...perature and the pressure analyze the ground water immediately after take it in without exposing to the atmosphere Check the water supply whether it is the ground water or not before use It is highly recommended to use cooling tower to circulate the water containing a large amount of carbonic acid ３ Cooling water should be stopped when the compressor is not running or it may cause corrosion or clo...

Page 26: ...oling Water Requirement A dashed arrow in the graph shows the minimum required water flow rate 3 5L min and water pressure drop 0 04MPa when the temperature of the water EXAMPLE Pressure drop ΔP MPa 0 08 0 06 0 0 072 0 02 0 04 0 5 10 15 20 30 32 25 Flow rate L min 35 0 1 2 3 4 5 6 Allowable operating range Temperature C 3 5 3 4 ULVAC CRYOGENICS INCORPORATED ...

Page 27: ... compressor Connect the helium gas return flexible hose to the helium gas return connector on the compressor b Connect the helium gas supply flexible hose to the helium gas supply connector on the cryopump Connect the helium gas return flexible hose to the helium gas return connector on the cryopump b Connect the helium gas supply flexible hose to the helium gas supply connector on the cryopump Co...

Page 28: ...ort straight and tighten by hand Tighten the self sealing coupling using two wrenches until the fittings are firmly sealed When using torque wrench torque the connection to 20N m Figure 3 3 Connecting Flexible Hose Braid Support Hold here with a wrench Tighten self sealing coupling with a wrench ...

Page 29: ...e to or destruction of the equipment REMOTE WIRING Set the REMOTE LOCAL switch to REMOTE position Make the REMOTE wiring according to the circuit diagram shown in Appendix B Always use the momentary switch contact for setting START STOP push button switch PB1 PB2 in remote operation RESPONSE WIRING Be sure to make wiring for RESPONSE signals The relay specification of response signals is shown in ...

Page 30: ...source Note If customer supplied input power cable is used be sure that it is equivalent to UCI supplied cable Table 3 2 Input Power Cable Specifications Item Symbol Specifications Input power cable INPUT POWER Copper wire 600VAC 3 conductors with ground 1 1 25mm2 1 The color of the ground wire is green CRYOPUMP FLEXIBLE HOSE SUPPLY FLEXIBLE HOSE RETURN REMOTE RESPONSE INPUT POWER CABLE COLD HEAD ...

Page 31: ... is supplied to the compressor Please be noted that the switch will light up dark light even the phase is reversed If the compressor does not start when the START switch has been pressed there is possibility of reversed phase Change any one set of RST phases 3 REMOTE LOCAL switch is properly set 4 Cooling water requirements is within the specified values 5 Helium gas static pressure is within the ...

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Page 33: ... cryopump refrigerator unit has been warmed up to room temperature disconnect the flexible hoses If removing the flexible hoses before the refrigerator reaches room temperature helium gas shut up into the refrigerator increases pressure with the rise of temperature and may blow off from a pressure relief valve finally It might cause a helium leakage also However only when carrying out helium circu...

Page 34: ...Refer to Section3 3 3 Put the protective caps back on the helium gas connectors and cover the compressor unit with vinyl sheet as they were shipped 4 Avoid direct sunlight heat humidity vibration radiation dust wind a nd rain 5 The compressor unit should be placed on level floor within 5 an dfixed not to move and or fall 6 Check the pressure gauge of the compressor unit periodically Contact o ur S...

Page 35: ...low the instruction below as well as the instructions above Operate the compressor unit for about an hour every three months to ci rculate lubricating oil to prevent the damage caused by the lack of the oil when starting the compressor unit again after long term storage When shipping the compressor unit pack as it was shipped from us and avoid extreme shock ...

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Page 37: ...orming helium circuit decontamination equipments regulators charging hoses adopters etc that can be used at 2 0MPaG or above are required If the helium pressure gauge of the compressor unit shows 0 MPaG contamination caused by air or moisture may occur in the system If it occurs contact our Service Engineering Division or customer support center When the gas pressure is lowered it is necessary to ...

Page 38: ... Remove the front panel of the compressor unit 3 Connect the helium charging hose as follows ａ Connect the charging hose to the regulator ｂ Loosely connect the charging hose to the charge inlet on the compressor unit to allow slight amount of helium gas to escape ｃ Open the regulator until the outlet pressure reaches 0 1 to 0 2 MPaG Allow helium gas to flow out from the charging hose for about hal...

Page 39: ...rescribed pressure of 1 9MPaG or more the pressure relief valve on the refrigerator may be going to work Therefore charge helium gas slowly so that the pressure relief valve should not operate On the other hand the pressure relief valve in the compressor unit is set at 2 5MPaG 6 Close the charge valve after charging helium gas 7 Close the regulator and remove the charging hose from the charge inle...

Page 40: ...ICS INCORPORATED Figure 6 1 Charging Helium Gas Bottle alve Regulator High pressure side Charging Hose Remove the front panel He C ging V ve CRYO U Helium Gas Bottle Flexible Hoses Compressor Front Panel Low pressure side V har al ...

Page 41: ...cuit protectors CP1 CP2 are active Check the cooling water condition temperature flow rate Check the power supply voltage Contact our Service Engineering Division or the nearest CS center Ⅱ Compressor does not start 1 No power coming from the source Check wiring and ensure that the power supply connecter is connected properly 2 Circuit protectors CP1 CP2 are OFF Turn the circuit protectors ON 3 Re...

Page 42: ... Over current protective switches MPA MPB or circuit protectors CP1 CP2 are active Check the power supply voltage Contact our Service Engineering Division or the nearest CS center The cooling water temperature and the room temperature will be needed 3 Compressor failure Contact our Service Engineering Division or the nearest CS center ...

Page 43: ...ing condition Compressor unit Cryopump Remarks Temperature Pressure Date Time Measurer Room temp Humidity ETM High pressure helium gas MPaG Current Ａ Cooling water flow rate L min 1st stage 2nd stage Pa K thermocouple MBS C H 2 VP etc Measure cooling water flow rate with flow meters for each compressor unit ULVAC CRYOGENICS INCORPORATED A 3 ...

Page 44: ...Troubleshooting A 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...

Page 45: ...ion TS1 Thermal switch Automatically stops the compressor operation if the oil flow rate is insufficient STOP push button switch PB1 lights ON TS2 Thermal switch Stops the compressor operation if the cooling water flow rate is significantly lowered or there is no cooling water inside the compressor unit STOP push button switch PB1 lights ON MPA Over current protective switch Located on top of the ...

Page 46: ...nector See P B 3 B 4 ETM Elapsed time meter Displays the total hours of the compressor unit operation MR Restart momentary relay for power supply failure In case power failure within 2 seconds the compressor unit can restart If power failure more than 2 seconds occurs the compressor unit will not restart CN3 Remote Response connector Indicates the Cold Head status of START STOP Connector and are o...

Page 47: ...Compressor Unit Instruction Manual ULVAC CRYOGENICS INCORPORATED B 3 B 4 ...

Page 48: ...Compressor Unit Instruction Manual ULVAC CRYOGENICS INCORPORATED B 5 B 6 ...

Page 49: ...necting 20N m It is fastened and crowded until self seal coupling stops turning Connection 1 2B self sealing coupling ２ Precaution in Handling When carrying the flexible hose hold the braid support of the hose If it is bended forcibly at an acute angle it may be damaged Avoid twisting the flexible hose especially when making final connection Keep away from water and salt to prevent corrosion Do no...

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Page 51: ...he compressor pump and transferred to the helium heat exchanger As passing through the heat exchanger the heat generated during compression is removed and then the cooled helium enters oil separator Inside the oil separator the oil droplet contained in helium is removed and returns to the compressor unit after passing through a filter and a orifice At the same time the helium from oil separator en...

Page 52: ...ion filter Differential pressure regulating valve Helium RETURN Helium charge valve Pressure relief valve High pressure gauge Helium SUPPLY Check valve Compressor Oil return orifice Oil injection orifice Solenoid controlled valve TS1 TS2 OUT IN Cooling water Helium heat exchanger Oil heat exchanger Helium Gas Flow Oil Flow Helium Gas Oil Flow Cooling Water Flow N C ...

Page 53: ...6397 0112 Fax 81 6 6397 0126 Inquiries about cryostats or LN2 generators Kyoto Factory 140 1 Megawa Makishima cho Uji kyoto 611 0041 Japan Tel 81 774 28 5595 Fax 81 774 20 2201 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Cheongbuk Myeon Pyeongtaek si Gyeonggi Do Korea 451 831 Tel 82 31 683 2926 Fax 82 31 683 2956 ULVAC CRYOGENICS NINGBO INC www ulvac cryo com 1 2 Floor Sh...

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Page 55: ...e connector Deletion of the descriptions related to adsorber replacement Cover Export control policy has been revised Full fledged revision P B 3 6 C10T Compressor unit circuit diagram and wiring diagram have been revised Service Network has been revised Safety Instruction No 3 and No 5 have been revised SERVICE NETWORK has been revised Introduction and SERVICE NETWORK have been revised Safety Ins...

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