Ulvac C30MVER, Installation, Operation, Maintenance And Troubleshooting Instructions

Page 1: ...hat pump nitrogen gas at pumping speed of 15000L S or more fall under row 2 35 of appended table 1 of Japan s Export Trade Control Order which is based on international export control regimes Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re exporting those products D N MD30XVRE 2018MH19 ULVAC...

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Page 3: ... where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the personnel should be familiar with handling a cryopump in order to use it safely Since we offer a training session which is subject to fees as needed for people who use cryopumps for the first time please ...

Page 4: ...owns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disasters such as fire earthquake flood lightning salt damage and so on environmental pollution irregular voltage and or usage of undesignated power source Breakdowns that are outside the terms of warranty C...

Page 5: ...isplay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to give us information about the presence of the hazardous substance and or contaminant Also please be aware that we do not accept liability for damages by the contaminant which might be caused during tran...

Page 6: ...sfer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the specification change and the improvement of the product 3 If you have any questions or comments on this document please do not hesitate to contact us The phone numbers of local customer support centers ...

Page 7: ...could result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a risk of severe injury upon contact Corrosive chemicals used There is a risk of severe injury upon contact Flammable gas used There is a danger of fire or burn injury Explosive gas used There is a risk o...

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Page 9: ...and flexible hoses 2 7 2 6 Remote functions 2 7 Section 3 Unpacking and Inspection 3 1 3 1 Compressor carton 3 1 3 2 Shipping carton inspection 3 1 3 3 Unpacking 3 2 3 4 Carton contents 3 3 3 5 Inspection of the compressor and accessories 3 4 3 6 Flexible hoses and specifications 3 4 Section 4 Equipment Installation Piping and Wiring 4 1 4 1 Before installation 4 1 4 2 Connecting cooling water pip...

Page 10: ...ure 1 4 C30MVR Front panel Part 1 4 Figure 1 5 C30VR Compressor dimensions 1 5 Figure 1 6 Compressor front view 1 7 Figure 1 7 Compressor rear view 1 8 Figure 1 8 Anchor bolts mounting positions example 1 9 Figure 1 9 Cryopump installation with C30MVR compressor 1 12 Figure 1 10 C30VR compressor with inverter 1 13 Figure 2 1 Required space for compressor installation scale mm and levelness 2 2 Fig...

Page 11: ...riptions 4 12 Figure 4 13 Cut length of insulation coating 4 12 Figure 4 14 Fix with set screw 4 12 Figure 5 1 Helium static pressure and ambient temperature 5 2 Figure 5 2 Ready for operation 5 3 Figure 5 3 Reversed phase or open phase 5 3 Figure 5 4 Status display during C30MVR operation 5 3 Figure 7 1 Remove two nuts from the helium gas connectors 7 3 Figure 7 2 Remove all seven screws from the...

Page 12: ... 2 4 Table 2 4 Standard cables and flexible hoses 2 7 Table 2 5 Remote interface specifications 2 7 Table 2 6 Remote interface signals 2 9 Table 3 1 Carton contents 3 3 Table 3 2 Optional parts 3 3 Table 3 3 Flexible hose specifications 3 4 Table 5 1 Supply line helium pressure during operation 5 4 Table 7 1 Scheduled maintenance 7 1 Table 7 2 Equipment requirement for adding helium gas 7 7 Table ...

Page 13: ...ging helium gas or performing helium line decontamination please read the Maintenance section carefully and follow the instruction Please supply the equipments regulators charging hoses adopters etc that can be used at the pressure of 2 0MPaG or above Switching between ON and OFF should be less than 6 times per hour and ON and or OFF condition should be maintained longer than 3 minutes Frequent st...

Page 14: ... We collect used adsorbers If there is any used absorber please contact a person in your local dealership or Ulvac Techno Ltd to have it picked up or send it directory to our Service Engineering Division We only accept CTI adsorbers and our adsorbers 5 Electrical wiring connections Power supply voltage must be kept within the allowable range Applying more than the allowed voltage may damage the eq...

Page 15: ...ng water for compressor The upper limit of the compressor operating ambient temperature is 35 38 except for C30VR Do not use the compressor in unsuitable environments such as dusty highly humid environments and or places that are affected by strong electromagnetic waves Refer to Section1 Table 1 5 Installation environment and operation requirements and Table 1 6 Electromagnetic environment resista...

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Page 17: ...ng to directions of the safety supervisor Do not disassemble pressurize heat and or throw into fire The adsorber may explode For safe disposal of an adsorber follow the procedures below 1 Depressurize the high pressure helium gas in the adsorber to an ambient atmospheric pressure To do so safely connect the proper tools such as our charging adaptor for refrigerator maintenance 2 Before proceeding ...

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Page 19: ... the contents of both the C30VR compressor and related components To ensure safe reliable system performance read this manual as well as other relevant manuals completely to gain a thorough understanding before beginning work 1 2 Compressor model descriptions C30VR has several models as below See Figure1 1 Table1 1 differentiated by model designations The model designation is written on the shippi...

Page 20: ... is the CRYO U series cryopump which can pump almost any gas and the other is CRYO T super trap series which is specialized for pumping water Unless otherwise indicated the term cryopump refers to both types 3 The term Compressor means compressor assembly The helium compressor which is a part of the assembly is sometimes called compressor pump to differentiate from the assembly 4 The cryopump syst...

Page 21: ...ore refilling helium gas is not necessary for long time Helium gas is compressed in a highly reliable oil injection type helium compressor Helium gas recovers its purity as it flows through an oil separator and an adsorber where contaminants are removed It is necessary to check the elapsed time of operation and replace adsorber regularly to maintain refrigeration capacity as well as prevent breakd...

Page 22: ...motor drive Single refrigerator 2 phase motor drive Figure 1 3 C30VR Front panel Part Multiple refrigerators 3 phase motor drive Multiple refrigerators 2 phase motor drive Figure 1 4 C30MVR Front panel Part Do not plac objects or equipments on top of a compressor It prevents heat to be released from compressors as well as applying unnecessary heat to the equipments placed on it e CAUTION ...

Page 23: ...rent types of compressor Table 1 2 Compressor weight Table 1 2 Compressor weight Model Model Weight kg Weight kg C30MVR C30MVER 131 C30VR 127 C30VRT C30PVRT C30MVRT C30MVERT 121 The weights in this table are of standard compressors The weight depends on the specifications of the customer s order 1 6 4 General specifications The tables below show power supply rating cooling water requirements insta...

Page 24: ...t by 5 compared to the nominal value 2 Circuit Breaker Current Rating Interrupt Rating Table 1 4 Cooling water requirements Item Requirements Water temperature Cooling water inlet 5 32 Flow rate 5 15 L min Cooling water supply pressure Max 0 7MPaG Pressure drop water inlet to water outlet 0 02 0 17MPa See Fig 2 3 Alkalinity pH 6 5 8 0 pH Calcium Carbonate 75ppm Refer to Section 2 4 Cooling water r...

Page 25: ...wer line 1 1500V Noise immunity Input output line 1 500V 1 By fast transient burst method Test duration 1 min 1 7 Component descriptions This section describes components which need adjustments and or verifications during operation and maintenance Compressor front view is shown in Figure 1 6 and rear view in Figure 1 7 both C30MVR Figure 1 6 Compressor front view CASTERS HELIUM FILL FITTING inside...

Page 26: ...uge the helium It displays the elapsed tim can not be changed GAUGE The high p indicates the static helium filling pressure when the compressor is not in operation and the supply line helium pressure when the compressor is in operation Refer to Section 5 1 Verification of helium static pressure to verify pressure when the compressor is not in operation CIRCUIT PROTECTOR REMOTE INPUT OUTPUT RECEPTA...

Page 27: ...usting system helium pressure for det Use them to move th compressor Figure 1 8 Anchor bolts mounting positions example 8 M10 anchor volt Front All casters of the compressor unit must be locked after the compressor unit has been placed at a proper position or in storage This is to avoid injury to persons from an unexp slippage of the compressor It is also required to have preventative measures for...

Page 28: ...in operation NOTE CH2 and CH3 indicators are effective only for the C30MVR which can be connected to multiple refrigerators One or more STS LED indicators for alarm indication will light up when malfunction of the compressor is detected Hereafter this event is referred to as alarm in this manual When an alarm lights up the buzzer will be activated as well In an event of alarm check the status with...

Page 29: ...on 1 5 Roles of compressor in cryopump system to understand the operation of helium closed loop cryopump system Also refer to Section 4 3 connecting and disconnecting helium flexible hoses for connection method of helium lines COOLING WATER INLET WATER IN Cooling water from customer s facility is supplied through this inlet to cool the compressor during operation Customers need to have cooling wat...

Page 30: ...ion C30MVR can operate up to three cryopumps at a time See Table 1 1 Figure 1 9 depicts a typical multi cryopump installation with single compressor For detailed instructions on cryopump installation with compressor refer to Section 4 4 Single cryopump installation and Section 4 5 Multiple cryopump installation Helium supply lines Helium manifolds Cooling water Remote cable Helium return lines Ref...

Page 31: ... regeneration time by changing operation frequency Figure 1 10 shows the appearance of the C30VR with an inverter Wire connections and the settings such as inverter frequency depend on your application and system Please consult with our Service Engineering Division or contact to the nearest customer support center Rear Front Figure 1 10 C30VR compressor with inverter ULVAC CRYOGENICS INCORPORATED ...

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Page 33: ... Refer to the table in Appendix B Combination of C30VR Compressor and Cryopump Super trap for typical combinations of cryopumps super traps and compressor units 2 2 Installation environment requirements Refer to Table 1 5 in Section 1 and check the installation environment and operating conditions to ensure there is no problem The environment should be free from contaminants such as oil coolant an...

Page 34: ...mm2 5 5mm2 8 mm2 2 1 The color of the ground wire is green 2 Unless otherwise specified 5 5 mm 2 cables are attached to the compressor Supply AC power for compressor from the equipment side distribution panel The distribution panel should have branched circuit breakers for each compressor see Figure 2 2 Circuit breakers must be appropriate and meet the international and the national codes and stan...

Page 35: ...ctor 20 AWG Option 2 Remote cable REMOTE RESPONSE Connector 22 AWG Customer supply 1 It is a specialized cable compatible with conventional general purpose compressors such as C30V and C30MV Current rating of the refrigerator is less than 0 7A ATTENTION Refer to Section 4 Equipment Installation Piping and Wiring for routing of the cables above T S R de distribution panel sor X 2 PE equipment si C3...

Page 36: ... management where the compressor is installed outside Japan It is necessary to check chemicals and water quality to avoid corrosion clogging and other faults caused by low quality of water and or chemicals Note2 Ground water may contain a great quantity of carbonate acid which facilitates corrosion Ensure to perform carbonate check as soon as water is taken from ground without exposing water to at...

Page 37: ...r flow rate water supply temperature and water pressure loss Except for C30PVRT 0 2 0 17 0 1 0 3 0 04M Pa 0 02 0 15 0 05 0 5 10 15 32 30 20 15 10 5 2 7 L min 0 25 Temperature upper limit Temperature lower limit Water flow rate L min Flow rate upper limit Operating water temperature range Flow rate lower limit Allowable temperature See CAUTION above 1 When water temperature is at 30 Water supply te...

Page 38: ...o install a filter in the Cooling water inlet line in order to remove contaminant in the cooling water Installing a water flow meter in the cooling water line of the compressor is also recommended Temperature upper limit Temperature Lower Limit Water flow rate L min Water flow rate L min 3 0 06MPa 2 9L min Flow rate upper limit Flow rate lower limit Operating water temperature range Allowable temp...

Page 39: ... for different length of cables and or flexible hoses 2 6 Remote functions Compressors can be remote controlled from customer s equipment side The following provides information on features and functions of the remote interface and the time chart of signals It is also available to select an operating mode of the compressor in accordance with your applications The following information also contain...

Page 40: ...shows the remote output interface circuit Each output is an isolated output contact At the equipment side different power supply can be used for each signal However considering that the wiring is sequence signal line it is recommended to use a DC24V power supply for all signals Since it is the contact output the polarity of DC24V in Figure 2 6 can be reversed Make provisions for the interface circ...

Page 41: ... operating modes Momentary operating mode and Alternate operating mode You can neither use both operating modes at the same time nor switch one operating mode to the other depending on the situations Ensure to choose one of the operating modes and connect signal lines needed for the operating mode you chose Do not connect signal lines for the operating mode that you will not use Decide the operati...

Page 42: ...to turn ON COMP START signal Signal functions only for Alternate operating mode COMP ON OFF Compressor start Stop With Alternate operating mode turning this signal ON starts operation of the compressor pump and OFF stops all the refrigerators and the compressor With C30VR when the compressor pump starts operation the refrigerator starts operation at the same time With C30MVR the command for refrig...

Page 43: ...mand When the compressor starts operation the answer back signal is sent to the equipment Note Refer to Section 2 6 6 Signal timing charts Answer back signal delay as well ALARM Alarm When this signal is OFF the compressor is ready for operation or in operation When failure or malfunction occurs to the compressor the signal turns ON in other words the contact output closes and the signal is conduc...

Page 44: ...F CH2 REF COMP RUN CH1 ACK CH2 ACK 1 The holding time is 0 3 seconds or more Figure 2 8 Timing chart for Momentary operating mode with two refrigerators Delay and recovery of Answer back signal Please be sure to set the timeout time of an answerback signal as 8 seconds or more The reason is explained below In normal operation an answer back signal is fundamentally send to the equipment side within...

Page 45: ...0 shows the signal delay occurred in Alternate operating mode when the time period from a stop to a reboot is short and Figure 2 11 shows the timing chart of C30VR when a short power interruption has occurred in Momentary operating mode From the above mentioned the set value of the timeout of the answer back signal should be determined based on the condition in which only the compressor has detect...

Page 46: ...2 10 Signal delay when the time period from a stop to a restart is short In Alternate operating mode 1 t 2seconds INPUT POWER SUPPLY COMP START COMP STOP CH1 REF COMP RUN CH1 ACK COMP OPERATION CH1 OPERATION td 1 tw 5seconds Figure 2 11 Timing chart of C30VR when a short power interruption occurs In Momentary operating mode 2 14 ULVAC CRYOGENICS INCORPORATED ...

Page 47: ... C30VR refrigerator operation is synchronized with the compressor operation as shown in Figure 2 11 On the other hand for C30MVR refrigerators operation depends on the command from the equipment side after the input power is recovered In Alternate operating mode the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side NOTE Refer to...

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Page 49: ...ications 3 4 3 1 Compressor carton Compressors are shipped in a carton with wooden frame at the bottom 3 2 Shipping carton inspection Inspect the carton before unpacking for evidence of damage such as dents breakage wetness and or signs that the carton has been tipped over If there is any damage please contact the delivery company immediately Figure 3 1 Appearance of compressor carton Do not throw...

Page 50: ...n operate the handling equipment Personnel except for the operator of the handling equipment st keep away from the handling equipment and the compressor during the handling There are risks of dropping an er of the compressor Failure to bse ve this warning may result in severe bodily injury or fatal accident mu d or tipping ov o r CAUTION When cutting the straps handle a cutter with care and be awa...

Page 51: ...ble 3 1 Carton contents Item Quantity Compressor 1 Manual 1 Connector for remote operation 1 Table 3 2 Optional parts Item Quantity Input power cable 3m or customized length 1 Refrigerator cable 3m or customized length 1 3 １ Flexible hose 3m or customized length 2 6 １ Helium manifold for multiple refrigerator operation 2 2 Lipped bowl spanner flexible hoses installing tool 2 Gasket for helium coup...

Page 52: ...r if the helium static pressure is significantly low Accessories Accessories Inspect and visually confirm the accessories that there is no evidence of damage Inspect and visually confirm the accessories that there is no evidence of damage If any damage is found please contact our Service Engineering Division or the nearest customer support center If any damage is found please contact our Service E...

Page 53: ...ing and Inspection ULVAC CRYOGENICS INCORPORATED 3 5 When carry oses keep appropriate bend radius When storing them avoid corrosion a manner to handle other equipments ing flexible h nd condensation in the same CAUTION ...

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Page 55: ...bes appropriate procedure for installing C30VR and connecting the compressor to a CRYO U cryopump The procedure of connecting the compressor to a CRYO T super trap is the same as connecting to a cryopump however please refer to the relevant manual Figure 4 1 is the block diagram for the compressor installation Figure 4 1 Installation procedure Connecting cooling water piping Connecting flexible ho...

Page 56: ...o leakage To connect cooling water piping in any other way follow the manual of the component 4 3 Connecting and disconnecting helium flexible hoses Cooling water for this compressor must meet the requirements described in Section 2 4 Cooling water requirements Failure to observe this warning may result in damage to and or break down of the equipments CAUTION To ensure safe reliable system perform...

Page 57: ...d the braid support straight so that the connection parts fit properly and tighten by hands as tight as possible Then tighten the coupling with two spanners as shown in Figure 4 3 See Figure 4 4 for usage of two spanners The torque value is 20N m for both couplings Complete the procedure as quick as possible to minimize helium gas leakage 3 Supply flexible hose is labeled SUPPLY with green letters...

Page 58: ...he compressor rear panel and the refrigerator The procedures are shown below Connect the smaller refrigerator cable plug to the refrigerator receptacle For a 2 phase motor refrigerator the plug is self locking Fit the plug to the receptacle connection and push the plug while turning it to lock it For a 3 phase motor refrigerator insert the plug into the receptacle and then turn the rotating part o...

Page 59: ...cryopump 4 5 Multiple cryopump installation Figure 4 6 shows the connection of the compressor and multiple cryopumps 1 First install helium manifolds to the compressor connectors to connect multiple flexible hoses Refer to Section 4 3 Connecting and disconnecting helium flexible hoses for the method of installing manifolds as it is the same as connecting flexible hose to the compressor Connect fle...

Page 60: ...efrigerator cable connecting method described in Section 4 4 Single cryopump installation Figure 4 6 Connections of the compressor and multiple cryopumps example with three cryopumps HELIUM MANIFOLD COOLING WATER HELIUM SUPPLY FLEXIBLE HOSE HELIUM RETURN FLEXIBLE HOSE REFRIGERATOR POWER CABLES IN OUT RETURN SUPPLY NO 1 NO 3 NO 2 NO 2 NO 1 NO 3 ...

Page 61: ... cable first to the compressor and then to the circuit breaker of input power supply source Wiring connection at power supply side must be done properly in accordance with the specifications of customer supplied equipments Connect ground wire as well D class grounding Connect the plug of the input power cable to the compressor receptacle After connecting the plug to the INPUT POWER receptacle on t...

Page 62: ...ecifications and remote functions respectively Figure 4 8 Remote connector pin assignments for C30VR View of from the plug soldering side PIN No PIN No Input Signal Output Signal C30V_R REMOTE RESPONSE 1 6 Wire gauge AWG22 18 ALARM1 COMP START SRCN6A25 16P 2 7 8 9 10 11 14 15 16 ALARM2 COMP STOP COM COM COMP RUN1 COMP RUN2 GND COMP ON OFF COM 12 Reserved for Factory test 1 4 5 10 14 16 13 Remote c...

Page 63: ...erating mode wiring example for Single yopump operation cr SRCN6A25 24P 6 PIN No PIN No Input Signal Output Signal C30MV_R REMOTE RESPONSE 2 3 4 1 11 3 14 21 22 16 2 Wire gauge AWG22 20 CH1REF CH2REF CH3REF COM COMP START OP C CH1ACK1 CH1ACK2 CH2ACK2 CH3ACK1 1 2 COMP ON OFF COM 7 8 9 10 1 23 24 17 18 19 0 COMP ST OM COM CH2ACK1 CH3ACK2 COMP RUN COMP RUN GND ALARM1 ALARM2 12 Reserved for Factory te...

Page 64: ...duct command signals but not 6 7 8 and 9 Conversely in Momentary operating mode the pins number 6 7 8 and 9 should be wired as operation command signals but not 15 and 16 Therefore choose appropriate wiring depending on the operating mode 2 Wire GND pin number 14 only when it is needed GND has the same elec potential as the compressor chassis Connecting ground wire that has different power line su...

Page 65: ... be wired as operation command signals but not 6 7 8 and 9 Therefore choose appropriate wiring depending on the operating mode 3 Wire GND pin number 20 only when it is needed GND has the same electric potential as the compressor chassis Connecting ground wire that has different power line such as AC400V from the compressor power supply line may cause overcurrent or noise problem due to a ground lo...

Page 66: ...ng cables Peel off the insulating coating to exp proper length of the condu Pass the cables through the end bell and then solder the cables to the connector pins Cover the so If the bundle of the cables diameter is smaller than that of the clamp saddle wrap cables with tape to adjust the size of diameter so tha Assembling the connector 6 Assemb 7 Turn the set screw in clockwise to fix the end bell...

Page 67: ...e during the operation In addition analog wire is sensitive to and susceptible to noise it must be separated from other wirings in the method above If it is impossible to wire in separated conduits keeping enough distance between those wires can be effective as separating wires Interference between wires depends on electromagnetic force but in general it is effective to keep the distance of 300mm ...

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Page 69: ...that the flexible hoses between the compressor and the refrigerator are connected properly 3 See Figure 5 1 and check the proper helium filling pressure value at the actual room temperature 4 Make sure that the helium pressure shown in the high pressure side pressure gauge on the front panel is in the range of 0 04MpaG to the above proper value It is possible to start operating the compressor when...

Page 70: ...compressor chassis is normally turned on therefore the compressor will be powered on immediately by switching a power supply on the equipment side ３ Inspection of phase and voltage of an input power supply If PWR LED and RDY LED indicators light up after a few seconds from power on the compressor is ready for operation See Figure 5 2 If the buzzer keeps ringing after power on and all eight STS ind...

Page 71: ...STS indicators lights up and or the buzzer sound does not stop refer to Section 8 Troubleshooting to solve the problem WARNING There is a danger of hazardous voltage Only qualified electrical personnel familiar with the construction and risks of this equipment should perform procedure above Figure 5 2 Ready for operation Figure 5 3 ４ Operation Start operation of the compressor by remote function R...

Page 72: ...cement of the product explained in the following For reference the helium pressure during operation of C30MVR refrigerator R10 series andC30PVRT refrigerator R80 series with 3m flexible hoses are shown in Table 5 1 Table 5 1 Supply line helium pressure during operation C30MVR R10 R10R RM10 Refrigerator C30PVRT R80 R80RT RM80T Refrigerator Quantity of refrigerator 1 2 3 1 Helium Pressure at Start u...

Page 73: ...r from the compressor Also if the compressor will be stopped for long period it is recommended to stop supplying cooling water to avoid corrosion or clogging of the pipes inside the compressor and the heat exchanger In addition remove the water from the compressor when needed Refer to Section 6 1 1 Removal of cooling water piping to remove the water from the compressor 5 5 Maintenance operation fo...

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Page 75: ...ter out from the compressor under the conditions listed below Cooling water freezing When there is a danger of bursting cooling water piping due to freezing of the cooling water in the compressor Long term halt When the cryopump system is stopped for more than a week for holidays or other reasons Transfer When relocating the compressor Cooling water draining procedure The following procedure is av...

Page 76: ...G WATER OUT fitting as well 6 1 2 Disconnecting flexible hoses To disconnect flexible hoses from the compressor refer to Section 4 3 Connecting and disconnecting helium flexible hoses Put the dust caps or dust plugs back on the compressor and the removed flexible hoses to keep them in storage 6 1 3 Disconnecting cables Disconnect the refrigerator cable from the refrigerator It is not necessary to ...

Page 77: ...hoses and cables with covers or boxes Store them with the compressor Ensure that cooling water has been completely drained out from the compressor To store the compressor cover it with a plastic sheet or package cardboard Before storing the compressor write down the value of the helium pressure gauge Check the value and record it once a month If the value is clearly decreasing compared to the one ...

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Page 79: ...tenance Cycle h Adsorber replacement Max 24000h 30000h for C30MVE_R Refrigerator maintenance When needed See cryopump instruction manual Inspection for plumbing and wirings 12000h NOTE If a special maintenance plan for your specific application is needed please consult with our Service Engineering Division or the nearest customer support center NOTE Refer to Disposal Considerations when disposing ...

Page 80: ... screw driver and remove the rear panel Figure 7 2 and 7 3 6 Disconnect the self sealing coupling from the adsorber with two spanners The coupling is connected to the flexible hose above the bottom plate inside the compressor chassis Figure 7 4 See Figure 7 5 for usage of spanners to disconnect the coupling Disconnect the coupling quickly to minimize minor helium leakage 7 Remove the bolts that se...

Page 81: ... the mounting tab on the base of the compressor And then remove the adsorber from the compressor Figure 7 7 Hold Remove Figure 7 1 Remove two nuts from the helium gas connectors Figure 7 2 Remove all seven screws from the rear panel Figure 7 3 Remove the rear panel Figure 7 4 Remove self sealing coupling ...

Page 82: ...y 10 Connect self sealing coupling to the adsorber with the two spanners Tighten the coupling referring to Figure 7 5 Recommended tightening torque is 20N m Connect the coupling quickly to minimize helium leakage 11 Put the rear panel back on the compressor to align the helium connector of the adsorber with the hole of the rear panel and then remove the rear panel again Fix the adsorber mounting b...

Page 83: ...e a note of the value that the current accumulated operation time added to the adsorber replacement cycle hours in Table 7 1 Refer to Section 9 Disposal of equipment and component parts for disposing of used adsorber 7 3 Adjusting system helium pressure System helium pressure must be adjusted when the compressor is not in operation Refer to Section 5 1 Verification of helium static pressure for pr...

Page 84: ...elium gas 3 Wait until the helium pressure gauge reads the prescribed standard value described above When the pressure reaches the standard value close the valve by turning its knob clockwise 4 Replace the front panel of the compressor with the six screws Immediately after the compressor is shut down some areas inside may remain hot Wait at least 15 minutes until it cools down to conduct the work ...

Page 85: ...ding helium gas is required When charging helium or performing helium circuit decontamination equipments regulators charging hoses adopters etc that can be used at 2 0MPaG or above are required Table 7 2 shows items and devices required for adding helium gas Table 7 2 Equipment requirement for adding helium gas Item Specification Helium bottle 99 999 pure or above Pressure regulator For Helium gas...

Page 86: ...ale flared end connect this side to the compressor Pressure regulator handle Bottle valve Pressure regulator Helium bottle Helium charging hose The purity of helium gas to be charged must be above 99 999 If the purity is lower it may result in deterioration of the cryopump system or performance degradation CAUTION If the helium pressure of the cryopump system becomes 0 there is a risk that air or ...

Page 87: ... open the helium filling valve slightly turn it counter clockwise Allow a small amount helium gas to flow through the helium filling valve and the helium filling fitting to purge the air between them 4 2 Connect the 1 4 inch female flare end of the charging hose to the helium filling fitting of the compressor while the helium gas flows out from both the helium filling fitting and the charging hose...

Page 88: ...ock the breaker at OFF status for safety reason Disconnect the input power cable from the compressor Fol wing procedure must be undertaken by authorized electrician and mechanical personnel familiar with the construction and risk of this equipment Failure to observe this WARNING lo warning may result in severe bodily injury or fatal accident 7 5 Maintenance parts Table 7 3 shows parts that need re...

Page 89: ... state There are eight indicators called STS at the front panel of the compressor Please refer to Figure 8 1 for the alarm types of warnings and faults The alarm status code table shown in Figure 8 2 is labeled on the compressor body NOTE Ensure that all the operation command of the compressor is OFF while trouble shooting the compressor lit up off Figure 8 1 Alarm status table STS Description STS...

Page 90: ... Failure of power supply DC24V inside controller Blown fuse or power supply failure Call for servicing RDY indicator is OFF STS indicators indicate ALARM status and buzzer activated Does not meet requirements to start operation or there is a failure See detailed alarm codes in the following section 8 3 and take corrective action PWR indicator and or STS indicator blinks STS indicators indicate ALA...

Page 91: ...ow Set power supply voltage within the available range Relay fault inside Controller or fault such as refrigerator cable disconnection Call for servicing Replace the refrigerator cable RDY indicator lights OFF and the compressor stopped running STS indicators light up and buzzer sounds Interlock is activated See detailed alarm codes in the following section 8 3 and take corrective action After a s...

Page 92: ...ng the compressor status and main power phase sequence If the input power supply voltage is low check the input power line and the user s power supply that has distributed electric power to the compressor When there is an open phase s all indicators should be blinked or turned off TS2 Over Temperature Over temperature TS2 monitors the temperature of the compressor pump If TS2 is activated it means...

Page 93: ...the alarm is not cleared by the procedures above please contact our Service Engineering Division or the nearest customer support center immediately CP2 Cold Head Trip Qvercurrent of refrigerator When this alarm lights up it means there is an over current in the refrigerator motor circuit and the circuit protector CP2 has been activated Turn OFF the compressor and check the compressor side refriger...

Page 94: ...o Please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller Other Status whereby both RDY and STS indicators are OFF In normal operation RDY indicators light up and STS indicators are off If both RDY and STS indicators are OFF it means there is a fault other than those listed above If the indicator shows the same status ...

Page 95: ... S N CRYO U OPERATING LOG POWER Ｖ φ Cryopump Measuring condition Compressor unit Temperature Pressure Remarks 1st stage 2nd stage Date Time Measurer Room temp Humidity ETM High pressure helium gas MPaG Current Ａ Cooling water flow rate L min K thermocouple MBS C H 2 VP etc Pa Measure cooling water flow rate with flow meters for each compressor unit ...

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Page 97: ...3 3 R10 R10R RM10 1 1 3 2 3 R10T R10RT RM10T 1 2 3 R20 R20R RM20 1 1 2 R20T R20RT RM20T 1 1 2 U16L 16 R20 R20R RM20 1 1 R50 R50R RM50 1 1 R50T R50RT RM50T 1 1 U20P 20 R50 R50R RM50 1 1 U20H U20HSP U20HL 20 R80 R80RT RM80T 1 1 U22P 22 R80 R80RT RM80T 1 1 R50 R50R RM50 2 1 1 R50T R50RT RM50T 2 1 1 R50 R50R RM50 2 1 1 R50T R50RT RM50T 2 1 1 RS10 RMS10 1 1 2 3 3 RS10T RMS10T 1 3 3 RS10 RMS10 1 1 2 3 3...

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Page 99: ...ns of setting and connections are shown in Table C 1 Table C 1 Differences on devices between compressor unit models Refrigerator Figure Model OL1 setpoint Cable Connector Max quantity Scott Transformer 3 to 2 phase C 1 C30VR 1 C 2 C30MVR C 2 C30MVER 26A For 2 phase drive For 2 phase drive 3 Installed C 3 C30PVRT 28A C 3 C30VRT 1 C 4 C30MVRT C 4 C30MVERT 26A For 3 phase drive For 2 phase drive 3 N...

Page 100: ...K RD E T S R W V U M COMPRESSOR MOTER TB2 COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1015 10 Cold Head No 1 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW BE YW BE YW BE BE YW BK BK RD BK RD YW GN YW GN BK BK RD RD BK WT RD RD BK BK WT RD YW ...

Page 101: ... POWER COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 24 UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1015 10 Cold Head No3 Cold Head No 2 Cold Head No 1 UL1007 24 UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW YW BE BE YW BE YW BE BE YW BE YW BK BK RD BK RD YW GN YW ...

Page 102: ... BK WT RD AC200V 3φ 8 9 6 5 FG YW GN UL1007 16 GN YW GN UL1007 18 BK RD BE YW YW YW BE BE BE YW E4 BK RD E T S R TB2 UL1015 14 YW BE BE YW BE YW BE YW YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW BE YW BE YW BE BE YW BK BK RD BK RD YW GN BK BK RD RD BK WT RD RD B...

Page 103: ...W GN UL1007 18 BK RD BE YW YW YW BE BE BE YW E4 BK RD E T S R YW BE YW BE YW BE TB2 COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE YW BE UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 Cold Head No3 Cold Head No 2 Cold Head No 1 UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 18 UL1007 18 UL1007 20 YW BE YW YW BE BE YW BE YW BE...

Page 104: ...C30VR Installation Operation Maintenance and Troubleshooting C 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...

Page 105: ...moval of compression caused heat It is cooled to an ambient temperature and then enters an oil separator In here the oil is separated and the droplets of separated oil pass thorough an oil return filter and oil return orifice before joining the low pressure helium gas and being returned to the compressor High pressure helium gas comes out from the oil separator enters an adsorber where oil mist is...

Page 106: ... separator Adsorber Oil return filter Oil return orifice S Solenoid valve for pressure equalization Oil injection filter LPS TS2 Differential pressure regulating valve Compressor pump OUT TS3 Oil heat changer Accumulator RETURN Low pressure switch Helium filling valve Pressure gauge Safety valve Cooling water IN Helium gas flow Helium gas and oil flow Oil flow Cooling water flow ...

Page 107: ...6397 0112 Fax 81 6 6397 0126 Inquiries about cryostats or LN2 generators Kyoto Factory 140 1 Megawa Makishima cho Uji kyoto 611 0041 Japan Tel 81 774 28 5595 Fax 81 774 20 2201 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Cheongbuk Myeon Pyeongtaek si Gyeonggi Do Korea 451 831 Tel 82 31 683 2926 Fax 82 31 683 2956 ULVAC CRYOGENICS NINGBO INC www ulvac cryo com 1 2 Floor Sh...

Page 108: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...

Page 109: ...ght has been corrected Introduction has been revised SERVICE NETWORK has been revised RM refrigerator has been added Full fledged revision Carton contents have been changed Cover Export control policy has been revised P 8 5 Alarm code description of CP2 has been revised P 3 3 Gasket for helium coupling spare in the Table 3 1 Carton contents has been moved to the Table 3 2 Optional parts P 2 4 Tabl...

Page 110: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...