05
<Operation>
(14) This pump is not designed for explosion-proof construction. Do not use the pump near
inflammables such as flammable solvent and in explosive atmosphere. There is a risk of injury
or fire.
(15) Do not insert a finger and substances into opening of the motor. There is a risk of electric shock,
injury and a fire.
(16) There is a risk of rupture. Do not operate the pump in the status that exhaust vent is blocked or
mounting equipment that hinder gas passage in the exhaust vent side. Increased internal
pressure of the pump may cause rupture of the main unit of the pump or overload to the motor.
This pump is not designed for pressure withstanding construction. Threshold value of pump
internal pressure is 0.03 MPa (gauge pressure).
<Maintenance / repair>
(17) Do not allow other personnel than
repair engineers
*
１
to disassemble or repair the pump.
* 1 Repair engineers: Those who are trained by ULVAC technical training.
(18) Wear dust mask and gloves when conducting replacement work. A minute abrasive particle
suspends in the air, and there is a risk to go into the human body when breathing.
<Installation>
(1) This pump is a machine having precise clearance. Satisfy the following requirements when
conducting storing, installation and operation
1. Operation temperature and the humidity
0
℃
to 40
℃
in temperature, Lower than 85%
(relative humidity) in humidity
2. Others (applicable both storing and operation)
a.
Level location where enough floor strength.
b.
No condensation.
c.
No dust.
d.
Well ventilated indoor.
e.
No explosive gas.
f.
No direct sun rays.
g.
No flammability risk.
h.
When Equipment is installed, temperature in pump circumference shall not exceed
40
℃
(2) There is a risk of hurting lower back. Lift the pump with both hands definitely to move and
conduct work.
(3) Abrasive particles of diaphragm may drain from the exhaust vent and pollute the room. Exhaust
it to out of the chamber by connecting pipes if necessary.
<Operation>
(4) Please do not use it to application coming in contact with human body transplant and body fluid /
a living body organization.
(5) Definitely do not touch the rotating section such as a motor, main spindle, coupling, cooling fan
while driving the pump. There is a risk of injury.
WARNING
CAUTION
