DC Power Supply
【
DC-10-D/DC-20-D/DC-10-DH/DC-20-DH
】
2. Overview
-3-
2. Overview
This chapter describes features, composition, and
specifications of this product.
2-1 Introduction
The DC-10-D/DC-20-D is designed as a DC power supply for sputtering with an output of 10/20kW.
The rated power can be supplied to the load by optimizing the load impedance of plasma.
2-2 Features
・
The output value can be checked on the monitor in the front of the power supply and the each
parameter setting on the panel.
・
For the operation method, you can select and operate the LOCAL mode (front panel), USER mode
(USER1 PORT), HOST mode (SERIAL communication/EtherCAT communication).
・
There are two models with a different rated output voltage: 800V and 1000V.
・
It can be used as a power supply system of 10 to 240kW by connecting several power supplies using
primary/secondary cables (*1). 10kW and 20kW can be combined respectively and flexibly, and and
up to 12 units can be connected. * Note that power supplies with a rated value of 800V and 1000V
cannot be combined as a system.
・
Equipped with a low arc energy circuit (*2), arc energy is suppressed by means of an excellent
abnormal electrical discharge (*3) process.
・
Depending on the option configuration, the machinery number (*4) is identified as shown in Table 1-2.
*1: Primary/Secondary cables are hereinafter described as P/S cables.
*2: Hereinafter a low arc energy circuit is referred to as LARC.
*3: Hereinafter an unusual electrical discharge is referred to as ARC.
*4: Hereinafter a machinery number is referred to as M/N.
Table 2-1. Option List
Option
（
M/N
）
Feature
A
ARC processing in a shorter time.
C
Guaranteed control from 1% of the rating.
E
Equipped with EtherCAT communication functions (*5).
R
Improved RAMP function.
S
Improved ARC function.
*5: With the EtherCAT option, USER1 PORT is physically removed.
Summary of Contents for DC-10-D
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