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YK18-0012-AI-101-02
Before Using the Machine
We thank you for purchasing a turbo-molecular-pump pumping system: Desktop YTP (hereinafter
referred to as "machine") of Ulvac, Inc.(hereinafter referred to as "We")
Upon receipt of the machine, please confirm the contents included are the same as you ordered
and check the machine for any damage attributed to transportation etc. just in case.
This operation manual (hereinafter referred to as "manual") describes appropriate operation and
maintenance methods in order to use the machine safely and effectively. Read this manual
beforehand and use the machine correctly.
Install and operate this machine according to the local and national safety laws and regulations
(such as fire laws and electric wiring code). Accordingly, you are required to take classes for
general safety that are valid in the country and the local area at the site. No one who hasn't take
the classes can handle the machine. The operator is required to have taken such trainings. In
addition, the operator has expertise, skills, qualifications in electrics, mechanics, cargo handling,
vacuum, etc.
This machine is designed to follow the current regulations as of the preparation of this manual. If
the criteria of the regulations are changed in the future, the compliance is not guaranteed.
If the device with this machine built-in doesn't follow the same regulations, or if any changes are
made to the machine itself, it may not be guaranteed to have its performance and safety. We
don't guarantee (have no responsibility for) such performance and safety. Any machine
modifications you have done are not covered by our warranty and we are not responsible for
them.
Before installing/removing this machine, keep the machine from all the energy sources (such as
electricity, cooling water etc.)
All the parts of this machine are not intended for permanent use with the performance at the
delivery. Even under the conditions of use expected in light of common sense, the performance
inevitably deteriorates with time, which tends to cause trouble on the machine. We would like to
ask you to grasp your conditions of use and cooperate to provide preventive maintenance to
avoid any trouble.
If you cooperate to make preventive maintenance measures, the likelihood of the trouble on this
machine attributed to malfunctions caused by worn parts will decrease and that of the risk, such
as downtime, fire, and influence on other processes, attributed to the trouble on this machine will
also decrease.
In addition, from the viewpoint of preventive maintenance, you are asked to prepare a
maintenance and inspection plan and conduct parts replacement and overhaul accordingly.
If you have any unclear points, please contact the closest sales office, agency, or our
Components Division.
