23
YK18-0012-AI-101-02
3.4
Piping and wiring
Shutdown of dangerous energy sources
Before working on piping or wiring, refer to "1.For safety use" to check that
all the dangerous energy sources have been shut down.
The structure of piping and wiring shall be designed so that vibration can be
absorbed.
For the vacuum piping, cooling water piping, purge gas piping, and electric
wiring, design a structure capable of absorbing the vibration to the predefined
level so as to avoid the torn and drop off of the piping.
3.4.1 Intake and exhaust port piping
Do not set 0.03 MPaG or more for the exhaust side pressure of the machine.
Measure the pressure on the pump exhaust side and if it is 0.03 MPaG (0.3
kg/cm2G) (gauge pressure) or more, remove the obstacle that blocks the
passage of the gas on the exhaust side.
If the pump internal pressure raises to 0.03 MPaG or more, the pump may be
burst.
●
Remove the flange cap for piping connection.
Before the factory shipment, a flange cap is attached to the intake port flange section. For connecting
piping, remove the flange for storage.
Contact a nearby service center.
●
Do not put a foreign object in the intake and exhaust port of the machine.
For connecting piping, take care not to drop off any foreign object (e.g., bolt) in the intake and
exhaust port of the machine. If a foreign object is dropped off, it is necessary to disassemble the
machine to remove the object.
●
Do not directly apply load on the intake and exhaust port of the machine.
Do not directly apply load of the connected piping etc on the intake and exhaust port of the machine.
●
Take care not to leave a flaw on the sheet surface of the gasket.
Take care not to leave a flaw on the sheet surface of the gasket (intake and exhaust port). After
assembling the piping, conduct a leak test for the entire system.
NOTE
WARNING
WARNING