Ulvac DISL-102, Instruction Manual

Page 1: ...Who sold it to you Purchase date When you began operation This instruction manual includes very important warnings cautions and operating procedure in order to operate this pump safely and efficiently...

Page 2: ...ve the following meanings Examples of marks WARNING Indicates a potentially hazardous situation which if not avoided may result in serious injury or loss of life CAUTION Indicates a potentially hazard...

Page 3: ...equipment is not stopped in an emergency it can cause accident fire or failure Install emergency stop switch Danger of accident fire or failure Be sure to install an electric source emergency stop swi...

Page 4: ...one it can cause bodily injury from entanglement with turning section or foreign matter dispersal Never alter Danger of electric shock and entanglement Do not remove or alter safeguards or insulation...

Page 5: ...g and incorrect voltage can cause motor burnout Inspect cause of problem Danger of problem recurrence and failure Ifprotectivedeviceorthermalprotectoractivates besuretoturnoffelectricsourceandinspect...

Page 6: ...mp temperature can increase resulting in failure Operate while opening air flush port Danger of remaining moisture When evacuating moisture be sure to open air flush port air flush opened operation If...

Page 7: ...stickers Where to attach warning stickers Always keep warning stickers clean and legible If they become dirty or detached replace them with new ones If you need replacement stickers contact our sales...

Page 8: ...up 20 4 1 2 Shut down 20 4 2 Air flush opened operation 21 4 2 1 Preparation 21 4 2 2 Start up and shut down 22 4 2 3 When returning to air flush closed operation 22 5 Maintenance and inspection 23 5...

Page 9: ...branches who sold it to you or local sales offices Check the following accessories Instruction manual this one Air muffler for air flushing which is attached to the grip Please prepare electric sourc...

Page 10: ...en installing vacuum pump If not it can cause damage failure or bodily injury from falling vacuum pump or by being caught between vacuum pump and other material Be careful about lifting Upper Cover Sc...

Page 11: ...when shipping from factory Inlet NW25 Internal screw size Rc3 8 Handle Outlet NW16 Bracket Terminal Box 2 Name and structure of each section Structure of vacuum pump Orbiting Scroll OS Fixed Scroll FS...

Page 12: ...cause accident failure or bodily injury such as burns since this vacuum pump is an air cooled type Do not block inlet and outlet of cooling air with obstruction Necessary ventilated air volume Over 2...

Page 13: ...t If you have any questions about the selection of protective devices contact either our sales branches who sold it to you or local sales offices Install motor protective circuit breaker to protect mo...

Page 14: ...ble for isolation according to EN60947 2 and is equipped with an operating handle which is lockable in OFF position and complies with the other requirements of EN60204 1 clause 5 3 CAUTION Motor burno...

Page 15: ...15 60 3 5 200 50 1 6 200 60 2 0 230 50 1 8 230 60 1 8 Activate the emergency stop by electric source switch or protective device Avoid motor burnout by protective device chart 1 Use rated over 10A ele...

Page 16: ...on remove M5 nut of electric source terminal and change terminal plate as illustrated below Connect electric cable to terminal by using cable gland at 22mm hole of motor terminal box Insert electric s...

Page 17: ...ntering inlet When checking turning direction be careful not to enter foreign matter into an inlet Foreign matter entering inlet can cause failure Prevent foreign matter from entering Danger of overhe...

Page 18: ...automatic valve as the isolation valve which closes during power failure in order to prevent the drawback of debris inside pump into the vacuum chamber during power failure Use an appropriate and clea...

Page 19: ...is not guaranteed fluorine rubber can be used for all solvents Never evacuate hazardous gas Danger of entanglement and foreign matter dispersal Never put finger or foreign matter into air holes of bra...

Page 20: ...ible intake gas volume When sending N2 gas or dry air into air flush port pressure should be the same as atmospheric pressure and flow rate should be less than 5L min If not it can increase pressure i...

Page 21: ...not it can cause failure When doing air flush opened operation Noise level will increase by 5dB Install pump in an area which is not exposed to debris such as iron powder stone powder polish powder o...

Page 22: ...vapor You must shorten maintenance interval 5 2 page 24 when evacuating vapor since vapor temperature disposal volume disposal frequency and substances in vapor have an influence on pump operation Wh...

Page 23: ...valve between vacuum pump and vacuum chamber during pump shut down If vacuum pump stops during air flush opened operation atmospheric air is drawn back from air flush port to inside of vacuum pump an...

Page 24: ...spection after you turn off electric source If not it can cause bodily injury from electric shock or turning object Turn off electric source Danger of accident failure and shorter operating lifetime A...

Page 25: ...ething goes wrong Note 1 Be sure to use designated DISL exclusive grease Note 2 You must shorten maintenance standard when pumping vapor since vapor temperature disposal volume disposal frequency and...

Page 26: ...ng Check exhaust piping diameter and length Air outlet is clogged Motor protection gear activates Air outlet is clogged Inspect and repair Ultimate pressure is insufficient Air leaks from piping O rin...

Page 27: ...hether air flush system is used or not Note 3 Maximum voltage allowance is or 10 from motor rating Note 4 Noise emission value is measured at ultimate pressure Note 5 Noise emission value 1m is measur...

Page 28: ...27 8 2 Dimensions 8 3 Performance data...

Page 29: ...mp Therefore any damage to the other products caused by a malfunction of this vacuum pump shall not be covered by the warranty This warranty is valid only in Japan 9 2 After sales and service Periodic...

Page 30: ...ring Trouble situation Unusual sound Pressure degradation Irregular action Others Purpose of the usage Device s name if necessary Evacuated gas Type of the gas Hazardous situations for injury Yes No T...