SECTION 2
4
2. UNPACKING AND RECEIVING CHECK
2.1 Care to be taken in Unpacking
Carefully unpack the case containing the electron beam gun.
Prepare a clean room for inspecting the electron beam gun.
CAUTION
1.
Handle the EB gun more carefully not to drop it.
2.
Be careful not to hold the protruded portion of the electron beam gun or
hit the gun against other objects.
3.
When lifting it, hold it at the hearth.
4.
Wear clean gloves and take out the electron beam gun.
2.2 Check after Unpacking
After the electron beam gun and all standard accessories have been taken out
from the case, check the following. If the electron beam gun is already
mounted in the coater, open the chamber so that the interior of the unit can be
inspected.
(1)
Visually check the electron beam gun for scar or dent.
(2)
Check protruded portions of the unit such as the cooling pipes, emitter
assembly and magnet coil electrodes for damage.
(3)
Slowly turn the hearth by hand and check if it moves smoothly. Also
check that when the six crucibles have moved to their positions, they are
positioned properly with a click.
(4)
Check the quantity of accessories referring to the Standard Spare Parts
List in Table 2.1.
Summary of Contents for EGL-206M
Page 2: ...EB0007 03e...
Page 3: ...EB0007 03e...
Page 10: ......
Page 13: ...SECTION 1 3 Fig 1 1 Dimensional Drawing for EGL 206M EGL 406M...
Page 24: ...SECTION 3 14 Fig 3 1 Installation of two or more electron beam guns...
Page 26: ...SECTION 3 16 Fig 3 3 Typical water cooling piping arrangement...
Page 27: ...SECTION 3 17 Fig 3 4 Wiring arrangement in vacuum chamber...
Page 38: ...SECTION 5 28 Fig 5 1 Exploded view of emitter assembly and dimensional drawing for electrode...
Page 42: ...SECTION 5 32 Fig 5 2 Exploded view of EGL 206M EGL 406M...
