SECTION 5
30
EGL-206M/EGL-406M ( 2/3 )
No.
Part No.
Description
Q
’
ty
33
200001663800
Separator
SUS304
1
34
200001663900
Support
SUS304
4
35
200001664000
Base plate
SUS304
1
36
200008869300
Limit switch mount SUS304
1
37
200008869400
Limit switch base
SUS304
1
38
200008869500
Limit switch cover SUS304
1
42
210004030400
Bevel gear (2)
1
43
200000493200
Snap ring for hole
C type 26 SUS304
1
44
200000493300
Snap ring for shaft C type 10 SUS304
1
45
200000495600
Bearing #6000 special
2
46
200001664300
Collar
SUS304
1
47
200001664400
Shaft
SUS304
1
48
200001664500
Housing
SUS304
1
49
200003019800
Allen screw
SUS304 M3 6
4
50
200000604100
Allen screw SUS304 M4 6
10
51
200000604200
Allen screw SUS304 M4 8
8
52
200003029600
Allen screw SUS304 M4 10
15
53
200003029700
Allen screw SUS304 M4 12
2
54
200003029900
Allen screw SUS304 M4 20
4
55
200003030500
Allen screw SUS304 M5 10
5
56
200001538600
Allen screw SUS304 M5 15 (14)
4
57
200003031100
Allen screw SUS304 M6 40
4
58
200003031400
Setscrew SUS304 M5 6
2
59
210004016900
Emitter assembly
-
61
210004028700
Set pin
SUS304
2
62
210004028600
Insulator mount
Cu
2
63
210004026400
Anode plate
Mo
1
64
210004028100
Insulator
Alumina
2
65
210004028400
Insulator cover
SUS304
2
66
210004029400
Bracket
SUS304
1
67
210004025900
Beam former
Mo
1
68
210004028300
Fixed insulator
Alumina
2
Summary of Contents for EGL-206M
Page 2: ...EB0007 03e...
Page 3: ...EB0007 03e...
Page 10: ......
Page 13: ...SECTION 1 3 Fig 1 1 Dimensional Drawing for EGL 206M EGL 406M...
Page 24: ...SECTION 3 14 Fig 3 1 Installation of two or more electron beam guns...
Page 26: ...SECTION 3 16 Fig 3 3 Typical water cooling piping arrangement...
Page 27: ...SECTION 3 17 Fig 3 4 Wiring arrangement in vacuum chamber...
Page 38: ...SECTION 5 28 Fig 5 1 Exploded view of emitter assembly and dimensional drawing for electrode...
Page 42: ...SECTION 5 32 Fig 5 2 Exploded view of EGL 206M EGL 406M...