8
ULVAC CRYOGENICS INCORPORATED
operation
12 Circuit breaker
The breaker for entire equipment. (Inside)
13 Pressure censor (Inside)
Displays the pressure of the nitrogen tank. The system will be shutdown for
emergency if the pressure is lower than set value while dispensing nitrogen gas.
14 Pressure regulator (Inside)
Controls the discharge pressure of produced nitrogen gas. Refer to nitrogen gas
supply pressure meter
⑮
to adjust at the desired pressure (within specification
range)
15
Nitrogen gas supply pressure meter (Inside)
Displays the nitrogen gas supply pressure (set value).
Summary of Contents for GN-15i
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