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ULVAC CRYOGENICS INCORPORATED
4. System Diagram
Symbol
Item
Symbol
Item
AF1-3
Intake air filter
PS1
Pressure sensor
DT1
Drain trap
RV1
Relief valve
AT1,2
Adsorption tank
MC1
Miniature valve
BT1
Buffer tank
NV1
Flow rate control valve
CC1
Cooling tube
SV1,2
Solenoid valve
CV1,2
Check valve
SV3,4
Solenoid valve
FM1
Nitrogen gas flow meter
SV5,5’
Solenoid valve
MC1
Miniature valve
SV6
Solenoid valve
OR1
Orifice
SV7
Solenoid valve
P1-3
Compressor
V1
Solenoid valve
PG1,2
Pressure gauge
VA1
Sound absorbing evaporator
PR1
Pressure regulator
Nitrogen gas exit
φ
6 easy coupling
Spare port
Rc 1/4
Summary of Contents for GN-30i
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