Ulvac MBS-053, Instruction Manual

Page 1: ...3 01 Request to Users When perform installation of the pump and operation please read this manual by all means Please keep this manual to be able to refer anytime Manual contents have a case to modify...

Page 2: ...ge of hazardous gases and substances 1 1 1 2 Warning Electric shock 2 1 1 3 Caution High temperature 2 1 1 4 Warning Explosion 4 1 2 Safety Data Sheet SDS 4 2 Specification table 5 2 1 Specification 5...

Page 3: ...arge 16 5 Operation 17 5 1 Structure of pump 17 5 2 Cautions for operation 18 5 3 Start of operation 18 5 4 Stopping the operation 18 5 5 Protection feature 20 5 6 External control and alarm output 21...

Page 4: ...r wiring diagram 12 Fig 9 An Inlet EN60320 13 Fig 10 Change region of the voltage and frequency 15 Fig 11 Oil plug oil level gauge position 16 Fig 12 Oil level gauge 16 Fig 13 Structure of pump 17 Fig...

Page 5: ...ention in the security the specifications of this pump and a matter about operation method Read the Manual Thoroughly This product please uses instruction manuals after a reading before use definitely...

Page 6: ...owing after unpacking 1 The delivered pump is in accordance with your request 2 The specified accessories enough pump oil to use the pump once optional equipment have been provided A normal accessory...

Page 7: ...fatal accident or serious injury Warning When mishandled there is a possibility of the operator suffering a fatal accident or serious injury Caution When mishandled there is a possibility of the oper...

Page 8: ...n The Inlet pipe of the pump The Outlet pipe of the pump Always switch off the main power supply before installing electrical wiring or performing any electrical work on the pump Failure to do so may...

Page 9: ...p to explode the oil level gauge to protrude or the motor to be overloaded This pump is not resistant to pressure The internal pump pressure is limited to 0 03 MPa gauge pressure The Vacuum Pump Unit...

Page 10: ...or or pump There is a risk of fire Also do not place objects which block ventilation around the motor Abnormal heat generation may result in burns or fire Do not touch the motor while the pump is in o...

Page 11: ...uthorized waste disposal specialist to carry out disposal Danger This pump is for dry air or the dry nitrogen suck only MBS 053 01 has surface treatment to MBS 053 and it is increasing resistance to c...

Page 12: ...ricity Never insert hands fingers or thin objects through the motor operating Caution Arrange wires correctly in accordance with the Electrical Equipment Technical Standard and Wiring Regulations Inco...

Page 13: ...t the temperature of the pump body may exceed 90 and you must fit suitable guards to prevent contact with hot surfaces Please be sure to protect and cool surface of vacuum pump and away from human bod...

Page 14: ...haust entrance side of the exhaust vent put up and there is a thing that the motor becomes an overloaded 1 2 Safety Data Sheet SDS The attached Safety Data Sheet SDS shows chemical materials which may...

Page 15: ...t 200W Nominal speed 3500min 1 8 Motor Maximum power consumption 250W Have to power supply when take external control Refer to 5 6 9 speed control voltage External rotating speed control voltage DC 1...

Page 16: ...m pump Fig 2 Driver Box Interior Connecter for external control SAIE M12B 4 0 5U FP M16 AC Power inlet AC100 120V OR AC200 240V Internal control external control Changeover switch Internal External AC...

Page 17: ...ing occurs and in addition gives a pump damage of a mechanism Before connecting the pipe to the pump clean the inner walls of the vacuum chamber piping and vacuum valve to completely eliminate moistur...

Page 18: ...sing a backflow prevention facility When you exhaust an active gas toxic gas use a nitrogen gas for vent Note When open velocity of main valve is early there are the cases that step out of magnet coup...

Page 19: ...rature gas because it is it with about 80 degrees Celsius 3 3 Ultimate pressure A mechanical booster pump ultimate pressure is decided on by pressure of a fore pump For example become P 100 25 4 0Pa w...

Page 20: ...wing conditions be satisfied during storage installation and operation Ambient temperature relative humidity 0 C 40 C 85 RH or less Height above sea level during storage and installation 1 000 m or le...

Page 21: ...f a red wire 100V system and connector of blue wire 200V system 4 Install cover of a box certainly and insert a power cable Warning Power circuit is damaged when I apply voltage more than 150V by conn...

Page 22: ...Ear thing conductor of a pump connects with earth terminal of building or touchdown point of equipment certainly Unplug cords for power supply before connecting wires Otherwise an electric shock occur...

Page 23: ...r outlet installed by a qualified electrician This pump must be connected to a grounded metallic permanent wiring system or an equipment grounding terminal or lead on the product An inlet is suitable...

Page 24: ...ile pushing the unplug preventive hardware at the other end let it catch the hole to the side of the inlet in the interior Raise the unplug preventive hardware Insert the power cable firmly enough Low...

Page 25: ...e voltage change and frequency change in Domain B it shall operate with main rated values and shall be used practically convenient However operation with it is convenient and safe is maintained on pra...

Page 26: ...hamber an ultimate pressure rises and there is a case to give a fore pump a failure In addition you cause a sound level increase the pump breakage when the pump runs with lack of lubricating oil Wear...

Page 27: ...ts and outside magnets in the shape of coaxial including a can shield of nonmagnetic material Transmit power of a motor to a pump using this magnetic field 3 Clearance seal Tend to use oil seal for sh...

Page 28: ...l immediately Do not block the flow of air to the motor fan as the temperature of the motor and pump will increase 5 3 Start of operation Show normal operational method of this pump with a system of F...

Page 29: ...th an inner side magnet of magnet coupling and a slip does not come and however there is the case that does not synchronize in the case of load going over transmission capacity of magnet coupling and...

Page 30: ...ing 6 Over current protection Be motor stopping when go over torque 0 96N m 7 Over current electric fuse AC250V 10A 8 Magnet coupling step out detection Be step out detection when become less than tor...

Page 31: ...arm occurred be OFF Voltage range 5V 30V Sink current 5mA maximum Weidmuller SAIE M12B 4 0 5U FP M16 Fig 14 External control connector pin assignment The pair of SAIE M12B 4 0 5U FP M16 is SAIL M12G 4...

Page 32: ...a plug loosens rise of an ultimate pressure and oil leaking out come Once a week Pulled out the power plug before starting inspection and do not turn it on while inspection is in progress Doing so wi...

Page 33: ...mp inside and remove reaction products 7 The pump does not rotate Components inside the pump have burnt out Overhaul replace the damaged components 7 Problem with power supply voltage Set the power su...

Page 34: ...dd the specified amount of oil 4 6 The coupling spider malfunctions Replace the coupling spider 7 Abnormal sound is generated Components inside the pump have burnt out Overhaul replace the damaged com...

Page 35: ...disconnect the plug Do not open a cover of the driver box 7 7 Support in trouble In trouble please contact store or our company overseas business division Customer service department copes adequately...

Page 36: ...odifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Malfunctions t...

Page 37: ...fety and Health Law designates particular substances as the materials to be notified 2 Usage Status Operation Method Approx hours per day years and months Continuous Operation Intermittent Operation U...