RF POWER SUPPLY and MATCHINGBOX
5. Operation methods
16
5-7. Screen 6
At Screen 6, the equipment manufacturer, software version, and software creation date
information is displayed. Settings cannot be changed at the screen.
Figure 5-7 Screen 6
Table 5-6 Explanation of functions of Screen 6
Category
Function
ULVAC,Inc.
Displays the manufacturer of this equipment.
Ver.1.01 2012/09/05 Displays the software version and the software creation date.
*The software version and software creation date may differ from the items above.
5-8. External analog control
The phases of P01(OSC1) to P08(OSC8) can be configured externally by PHS-N. To
configure phases externally, configure "PHASE CONT=ANALOG".
Table 5-7 External control (EXT.CONT) pin assignment
Pin No.
Name
Overview
1
CH01
Configure the phase of P01(OSC1).
0.5 V to 9.5 V: 0.0° to 359.9°
2
CH02
Configure the phase of P02(OSC2).
0.5 V to 9.5 V: 0.0° to 359.9°
3
CH03
Configure the phase of P03(OSC3).
0.5 V to 9.5 V: 0.0° to 359.9°
4
CH04
Configure the phase of P04(OSC4).
0.5 V to 9.5 V: 0.0° to 359.9°
5
CH05
Configure the phase of P05(OSC5).
0.5 V to 9.5 V: 0.0° to 359.9°
6
CH06
Configure the phase of P06(OSC6).
0.5 V to 9.5 V: 0.0° to 359.9°
7
CH07
Configure the phase of P07(OSC7).
0.5 V to 9.5 V: 0.0° to 359.9°
8
CH08
Configure the phase of P08(OSC8).
0.5 V to 9.5 V: 0.0° to 359.9°
9 to 15
COM
Analog common of Pin No. 1 to Pin No. 8.
Insulated from FG.
ULVAC,Inc.
Ver.1.01 2012/09/05
Summary of Contents for PHS-04N
Page 2: ......
Page 17: ...RF POWER SUPPLY and MATCHINGBOX 3 Preparation 9 Figure 3 2 System wiring example...
Page 28: ...RF POWER SUPPLY and MATCHINGBOX 7 Reference materials 20 Figure 7 1 PHS 04N External diagram...
Page 29: ...RF POWER SUPPLY and MATCHINGBOX 7 Reference materials 21 Figure 7 2 PHS 08N External diagram...
